Ming Chun Chen

Automatic recipe adjust and download based on process control window

Dynamic process window control using simulated wet data from current and previous layer data

Intelligent usage of first pass defect data for improved statistical accuracy of wafer level classification

Automatic defect classification (ADC) reclassification engine

Automatic defect classification individual defect predicate value retention

Method to accurately determine classification codes for defects during semiconductor manufacturing

Disposition tool for factory process control

Automatic defect reclassification of known propagator defects

Semiconductor wafer optical scanning system and method using swath-area defect limitation

System for process data association using LaPlace Everett interpolation