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Mitsuaki Horiuchi

Hitachi

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Publication

Featured researches published by Mitsuaki Horiuchi.

Archive | 2001

Semiconductor integrated circuit device having switching MISFET and capacitor element and method of producing the same, including wiring therefor and method of producing such wiring

Jun Murata; Yoshitaka Tadaki; Isamu Asano; Mitsuaki Horiuchi; Jun Sugiura; Hiroko Kaneko; Shinji Shimizu; Atsushi Hiraiwa; Hidetsugu Ogishi; Masakazu Sagawa; Masami Ozawa; Toshihiro Sekiguchi

Archive | 1999

Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same

Jun Sugiura; Osamu Tsuchiya; Makoto Ogasawara; Fumio Ootsuka; Kazuyoshi Torii; Isamu Asano; Nobuo Owada; Mitsuaki Horiuchi; Tsuyoshi Tamaru; Hideo Aoki; Nobuhiro Otsuka; Seiichirou Shirai; Masakazu Sagawa; Yoshihiro Ikeda; Masatoshi Tsuneoka; Toru Kaga; Tomotsugu Shimmyo; Hidetsugu Ogishi; Osamu Kasahara; Hiromichi Enami; Atsushi Wakahara; Hiroyuki Akimori; Sinichi Suzuki; Keisuke Funatsu; Yoshinao Kawasaki; Tunehiko Tubone; Takayoshi Kogano; Ken Tsugane

Archive | 1994

Method of producing semiconductor integrated circuit device having memory cell and peripheral circuit MISFETs

Jun Murata; Yoshitaka Tadaki; Isamu Asano; Mitsuaki Horiuchi; Jun Sugiura; Hiroko Kaneko; Shinji Shimizu; Atsushi Hiraiwa; Hidetsugu Ogishi; Masakazu Sagawa; Masami Ozawa; Toshihiro Sekiguchi

Archive | 1998

Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring

Jun Murata; Yoshitaka Tadaki; Isamu Asano; Mitsuaki Horiuchi; Jun Sugiura; Hiroko Kaneko; Shinji Shimizu; Atsushi Hiraiwa; Hidetsugu Ogishi; Masakazu Sagawa; Masami Ozawa; Toshihiro Sekiguchi

Archive | 1987

Method for selective deposition of metal thin film

Eisuke Nishitani; Susumu Tsuzuku; Mitsuo Nakatani; Masaaki Maehara; Mitsuaki Horiuchi; Koichiro Mizukami

Archive | 1989

Apparatus for selective deposition of metal thin film

Eisuke Nishitani; Tsuzuku; Mitsuo Nakatani; Masaaki Maehara; Mitsuaki Horiuchi; Koichiro Mizukami

Archive | 2001

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP EXPOSED THROUGH A CONNECTING HOLE, A TRANSITION-METAL FILM IN THE CONNECTING HOLE AND AN ALUMINUM WIRING STRIP THEREOVER, AND A TRANSITION-METAL NITRIDE FILM BETWEEN THE ALUMINUM WIRING STRIP AND THE TRANSITION-METAL FILM

Jun Sugiura; Osamu Tsuchiya; Makoto Ogasawara; Fumio Ootsuka; Kazuyoshi Torii; Isamu Asano; Nobuo Owada; Mitsuaki Horiuchi; Tsuyoshi Tamaru; Hideo Aoki; Nobuhiro Otsuka; Seiichirou Shirai; Masakazu Sagawa; Yoshihiro Ikeda; Masatoshi Tsuneoka; Toru Kaga; Tomotsugu Shimmyo; Hidetsugu Ogishi; Osamu Kasahara; Hiromichi Enami; Atsushi Wakahara; Hiroyuki Akimori; Sinichi Suzuki; Keisuke Funatsu; Yoshinao Kawasaki; Tunehiko Tubone; Takayoshi Kogano; Ken Tsugane

Archive | 1995

Method of forming teos oxide and silicon nitride passivation layer on aluminum wiring

Jun Sugiura; Osamu Tsuchiya; Makoto Ogasawara; Fumio Ootsuka; Kazuyoshi Torii; Isamu Asano; Nobuo Owada; Mitsuaki Horiuchi; Tsuyoshi Tamaru; Hideo Aoki; Nobuhiro Otsuka; Seiichirou Shirai; Masakazu Sagawa; Yoshihiro Ikeda; Masatoshi Tsuneoka; Toru Kaga; Tomotsugu Shimmyo; Hidetsugu Ogishi; Osamu Kasahara; Hiromichi Enami; Atsushi Wakahara; Hiroyuki Akimori; Sinichi Suzuki; Keisuke Funatsu; Yoshinao Kawasaki; Tunehiko Tubone; Takayoshi Kogano; Ken Tsugane

Archive | 1989

SEMICONDUCTOR DEVICE WITH MULTILAYER BASE CONTACT

Nobuo Owada; Mitsuaki Horiuchi; Masatoshi Tsuneoka; Tadayuki Taneoka

Archive | 1999

Method of producing semiconductor integrated circuit device having switching MISFET and capacitor element including wiring therefor and method of producing such wiring

Jun Murata; Yoshitaka Tadaki; Isamu Asano; Mitsuaki Horiuchi; Jun Sugiura; Hiroko Kaneko; Shinji Shimizu; Atsushi Hiraiwa; Hidetsugu Ogishi; Masakazu Sagawa; Masami Ozawa; Toshihiro Sekiguchi

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Isamu Asano

Hitachi

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Hidetsugu Ogishi

Hitachi

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Jun Sugiura

Hitachi

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Masakazu Sagawa

Hitachi

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Hiroko Kaneko

Hitachi

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Jun Murata

Hitachi

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Masami Ozawa

Hitachi

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Masatoshi Tsuneoka

Hitachi

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Nobuo Owada

Hitachi

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Yoshitaka Tadaki

Hitachi

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