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Dive into the research topics where Mitsuaki Komino is active.

Publication


Featured researches published by Mitsuaki Komino.


Archive | 2001

Plasma treatment method and apparatus

Masayuki Tomoyasu; Akira Koshiishi; Kosuke Imafuku; Shosuke Endo; Kazuhiro Tahara; Yukio Naito; Kazuya Nagaseki; Keizo Hirose; Mitsuaki Komino; Hiroto Takenaka; Hiroshi Nishikawa; Yoshio Sakamoto


Archive | 1993

Stage having electrostatic chuck and plasma processing apparatus using same

Kenji Ishikawa; Mitsuaki Komino; Tadashi Mitui; Teruo Iwata; Izumi Arai; Yoshifumi Tahara


Archive | 2001

Plasma process apparatus

Mitsuaki Komino; Yoichi Ueda; Youichi Deguchi; Satoru Kawakami


Archive | 1993

Method of controlling temperature of susceptor

Kouichi Kazama; Mitsuaki Komino; Kenji Ishikawa; Yoichi Ueda


Archive | 1996

Treatment apparatus control method

Mitsuaki Komino


Archive | 1995

Method of forming a bonding portion

Makoto Aoki; Mitsuaki Komino; Masayuki Kitamura


Archive | 1998

Drying processing method and apparatus using same

Mitsuaki Komino; Osamu Uchisawa


Archive | 1995

Vacuum exhaust system for processing apparatus

Junichi Arami; Masayuki Kitamura; Mitsuaki Komino


Archive | 2000

Plasma processing apparatus, and electrode structure and table structure of processing apparatus

Mitsuaki Komino; Yasuharu Sasaki; Kyo Tsuboi; Hideaki Amano


Archive | 2000

Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor

Mitsuaki Komino; Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Yasuharu Sasaki

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