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Shosuke Endo

Tokyo Electron

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Publication

Featured researches published by Shosuke Endo.

Archive | 2001

Plasma treatment method and apparatus

Masayuki Tomoyasu; Akira Koshiishi; Kosuke Imafuku; Shosuke Endo; Kazuhiro Tahara; Yukio Naito; Kazuya Nagaseki; Keizo Hirose; Mitsuaki Komino; Hiroto Takenaka; Hiroshi Nishikawa; Yoshio Sakamoto

Archive | 2001

Plasma treatment apparatus and method

Takao Sakamoto; Kazuhiro Tahara; Kenji Momose; Kosuke Imafuku; Shosuke Endo; Yukio Naito; Kazuya Nagaseki; Keizo Hirose

Archive | 2000

Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor

Mitsuaki Komino; Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Yasuharu Sasaki

Archive | 1998

Plasma treatment method utilizing an amplitude-modulated high frequency power

Masayuki Tomoyasu; Akira Koshiishi; Kosuke Imafuku; Shosuke Endo; Kazuhiro Tahara; Yukio Naito; Kazuya Nagaseki; Keizo Hirose; Mitsuaki Komino; Hiroto Takenaka; Hiroshi Nishikawa; Yoshio Sakamoto

Archive | 1998

Process chamber apparatus

Junichi Arami; Shosuke Endo

Archive | 2000

Electrode, wafer stage, plasma device, method of manufacturing electrode and wafer stage

Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Mitsuaki Komino; Yasuharu Sasaki

Archive | 1996

Gas diffusion plate for electrode of semiconductor wafer processing apparatus

Kosuke Imafuku; Shosuke Endo; Kazuo Fukasawa

Archive | 2000

Electrode and method of manufacturing an electrode

Mitsuaki Komino; Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Yasuharu Sasaki

Archive | 2000

Elektrode, halbleiterscheiben-träger, herstellungsmethode für eine elektrode und einen halbleiterscheiben-träger

Mitsuaki Komino; Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Yasuharu Sasaki

Archive | 2000

Electrode and manufacturing method for an electrode

Hideaki Amano; Shosuke Endo; Toshiaki Fujisato; Mitsuaki Komino; Yasuharu Sasaki

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Collaboration

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Mitsuaki Komino

Tokyo Electron

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Kosuke Imafuku

Tokyo Electron

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Kazuhiro Tahara

Tokyo Electron

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Kazuya Nagaseki

Tokyo Electron

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Keizo Hirose

Tokyo Electron

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Yukio Naito

Tokyo Electron

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Akira Koshiishi

Tokyo Electron

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Hiroshi Nishikawa

Tokyo Electron

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Hiroto Takenaka

Tokyo Electron

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Masayuki Tomoyasu

Tokyo Electron

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