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Featured researches published by Mitsugi Sato.


Archive | 2005

METHOD AND DEVICE FOR INSPECTION BY CHARGED PARTICLE BEAM

Atsuko Fukada; Muneyuki Fukuda; Hidetoshi Nishiyama; Mitsugi Sato; Naomasa Suzuki; Noriji Takahashi; 佐藤 貢; 敦子 深田; 宗行 福田; 英利 西山; 直正 鈴木; 範次 高橋


Archive | 2004

Charged particle beam device and its collimation method

Makoto Esumi; Mitsugi Sato; Satoshi Yamaguchi; 佐藤 貢; 山口 聡; 真 江角


Archive | 2004

CHARGED PARTICLE BEAM DEVICE AND METHOD OF MEASURING MAGNIFICATION

Takashi Iiizumi; Hiromi Inada; Shigeto Isagozawa; Tatsuya Maeda; Mitsugi Sato; Atsushi Takane; 貢 佐藤; 達哉 前田; 成人 砂子沢; 博実 稲田; 孝 飯泉


Archive | 2003

Scanning electron microscope, and testpiece observation method using it

Kazutaka Futamura; Mine Nakagawa; Mitsugi Sato; Atsushi Takane; Shuichi Takeuchi; 美音 中川; 和孝 二村; 佐藤 貢; 秀一 竹内; 高根 淳


Archive | 2006

Charged particle beam device and image acquisition technique using the same

Hiroki Kawada; Tatsuya Maeda; Mayuka Osaki; Mitsugi Sato; Chie Shishido; 佐藤 貢; 達哉 前田; 真由香 大▲崎▼; 千絵 宍戸; 洋揮 川田


Archive | 2006

CHARGED PARTICLE BEAM DEVICE AND CHARGED PARTICLE BEAM PICTURE FORMATION METHOD

Hiroko Sasaki; Mitsugi Sato; 佐藤 貢; 裕子 笹氣


Archive | 2004

Charged particle beam device and dimension measuring method

Yoshihiko Nakayama; Katsuhiko Saii; Mitsugi Sato; Atsushi Takane; 佳彦 中山; 佐藤 貢; 克彦 洒井; 高根 淳


Archive | 2004

Electric charged particle beam apparatus and charged particle beam microscopy

Hiromi Inada; Mitsugi Sato; Atsushi Takane; 佐藤 貢; 博実 稲田; 高根 淳


Archive | 1990

Separation of rare earth element

Fumio Mikuni; Hiromi Mochida; Jiro Oshima; Fumitaka Sakurai; Mitsugi Sato


Archive | 2007

Charged-particle beam microscope, image formation method, and computer for evaluating image resolution

Takashi Iiizumi; Toru Ishitani; Tadashi Otaka; Mitsugi Sato; Atsushi Takane; Hideo Todokoro; 佐藤 貢; 正 大高; 秀男 戸所; 亨 石谷; 孝 飯泉

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