Mitsuo Tada | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Mitsuo Tada is active.

Explore More

Publication

Featured researches published by Mitsuo Tada.

Archive | 2004

EDDY CURRENT SENSOR

Mitsuo Tada; Yasunari Suto

Archive | 2010

Substrate polishing apparatus and substrate polishing method

Tetsuji Togawa; Koichi Fukaya; Mitsuo Tada; Taro Takahashi; Yasunari Suto

Archive | 2001

Frequency measuring device, polishing device using the same and eddy current sensor

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 2011

EDDY CURRENT SENSOR AND POLISHING METHOD AND APPARATUS

Mitsuo Tada; Taro Takahashi

Archive | 2006

Polishing device using eddy current sensor

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 2005

Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing Apparatus

Mitsuo Tada; Yasunari Suto; Hirofumi Ichihara; Kenya Ito; Tamami Takahashi

Archive | 2006

Method of detecting characteristics of films using eddy current

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 1998

Plating apparatus for detecting the conductivity between plating contacts on a substrate

Junichiro Yoshioka; Satoshi Sendai; Atsushi Chono; Mitsuo Tada; Akihisa Hongo; Yoshitaka Mukaiyama; Kenya Tomioka; Akira Ogata; Kenichi Suzuki; Naomitsu Ozawa

Archive | 2005

Substrate peripheral portion measuring device and method, substrate peripheral portion polishing apparatus and method, and substrate rinsing apparatus and method

Mitsuo Tada; Yasunari Suto; Hirofumi Ichihara; Kenya Ito; Tamami Takahashi

Archive | 1998

Plating device and method of confirming current feed

Junichiro Yoshioka; Satoshi Sendai; Atsushi Chono; Mitsuo Tada; Akihisa Hongo; Yoshitaka Mukaiyama; Kenya Tomioka; Akira Ogata; Kenichi Suzuki; Naomitsu Ozawa

Explore More