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Yasunari Suto

Ebara Corporation

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Publication

Featured researches published by Yasunari Suto.

Archive | 2004

EDDY CURRENT SENSOR

Mitsuo Tada; Yasunari Suto

Archive | 2010

Substrate polishing apparatus and substrate polishing method

Tetsuji Togawa; Koichi Fukaya; Mitsuo Tada; Taro Takahashi; Yasunari Suto

Archive | 2001

Frequency measuring device, polishing device using the same and eddy current sensor

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 2006

Polishing device using eddy current sensor

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 2005

Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing Apparatus

Mitsuo Tada; Yasunari Suto; Hirofumi Ichihara; Kenya Ito; Tamami Takahashi

Archive | 2006

Method of detecting characteristics of films using eddy current

Mitsuo Tada; Hironobu Yamasaki; Yasunari Suto

Archive | 2005

Substrate peripheral portion measuring device and method, substrate peripheral portion polishing apparatus and method, and substrate rinsing apparatus and method

Mitsuo Tada; Yasunari Suto; Hirofumi Ichihara; Kenya Ito; Tamami Takahashi

Archive | 2005

Dispositif et procede de mesure de partie peripherique de substrat, appareil et procede de polissage de partie peripherique de substrat, et appareil et procede de rinçage de substrat

Mitsuo Tada; Yasunari Suto; Hirofumi Ichihara; Kenya Ito; Tamami Takahashi

Archive | 2004

Substratpoliervorrichtung und Substratpolierverfahren Substrate polishing apparatus and substrate polishing method

Tetsuji Togawa; Koichi Fukaya; Mitsuo Tada; Taro Takahashi; Yasunari Suto

Archive | 2001

Frequenzmesseinrichtung, sie verwendende Poliereinrichtung und Wirbelstromsensor

Yasunari Suto; Mitsuo Tada; Hironobu Yamasaki

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Collaboration

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Mitsuo Tada

Ebara Corporation

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Hironobu Yamasaki

Ebara Corporation

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Hirofumi Ichihara

Ebara Corporation

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Kenya Ito

Ebara Corporation

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Tamami Takahashi

Ebara Corporation

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Koichi Fukaya

Ebara Corporation

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Taro Takahashi

Ebara Corporation

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Tetsuji Togawa

Ebara Corporation

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