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Miwa Kozawa

Fujitsu

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Publication

Featured researches published by Miwa Kozawa.

Archive | 2008

Resist pattern swelling material, and method for patterning using same

Koji Nozaki; Miwa Kozawa; Takahisa Namiki; Junichi Kon; E I Yano

Archive | 2002

Resist pattern thickening material, resist pattern and forming process thereof, and semiconductor device and manufacturing process thereof

Miwa Kozawa; Koji Nozaki; Takahisa Namiki; Junichi Kon; E I Yano

Archive | 2006

Resist pattern thickening material and process for forming resist pattern, and semiconductor device and process for manufacturing the same

Koji Nozaki; Miwa Kozawa; Takahisa Namiki

Archive | 2003

Resist pattern thickening material, process for forming resist pattern, and process for manufacturing semiconductor device

Miwa Kozawa; Koji Nozaki; Takahisa Namiki; Junichi Kon

Archive | 2003

Resist pattern thickening material, resist pattern and process for forming the same, and semiconductor device and process for manufacturing the same

Koji Nozaki; Miwa Kozawa

Archive | 2001

Negative resist composition, process for forming resist patterns, and process for manufacturing electron device

Koji Nozaki; E I Yano; Miwa Kozawa

Archive | 2002

Resist pattern thickening material, resist pattern and forming method thereof, and semiconductor device and manufacturing method thereof

Koji Nozaki; Miwa Kozawa; Takahisa Namiki; Junichi Kon; Ei Yano

Archive | 2001

Silicon-containing polymer, process for its production, resist composition employing it, pattern-forming method and electronic device fabrication method

Miwa Kozawa; Keiji Watanabe; Ei Yano

Archive | 2002

Negative resist composition, method for the formation of resist patterns and process for the production of electronic devices

Koji Nozaki; Takahisa Namiki; Ei Yano; Junichi Kon; Miwa Kozawa

Archive | 2006

Resist cover film-forming material, process for forming resist pattern, semiconductor device and process for manufacturing the same

Koji Nozaki; Miwa Kozawa

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Collaboration

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Koji Nozaki

Fujitsu

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Takahisa Namiki

Fujitsu

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Junichi Kon

Fujitsu

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Ei Yano

Fujitsu

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Koji Kawasaki Nozaki

Fujitsu

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Keiji Watanabe

Fujitsu

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E I Yano

Fujitsu

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Takahisha Namiki

Fujitsu

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Eiichi Hoshino

Fujitsu

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Masahiro Uraguchi

Fujitsu

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