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Dive into the research topics where Miyako Kaneko is active.

Publication


Featured researches published by Miyako Kaneko.


Archive | 2007

Substrate cleaning apparatus and substrate cleaning method

Miyako Kaneko; Takehiko Orii; Satoru Shimura; Masami Yamashita; Itaru Kanno


232nd ECS Meeting (October 1-5, 2017), | 2017

Solid Phase Clean : Improving Performance for Smaller Particle Removal without Pattern Damage and Film Loss

Meitoku Aibara; Kenji Sekiguchi; Miyako Kaneko; Derek Bassett; Itaru Kanno


Archive | 2015

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY MEDIUM

Miyako Kaneko; Keiji Tanouchi; Takehiko Orii; Itaru Kanno; Meitoku Aibara; Satoru Tanaka


Archive | 2013

Substrate cleaning method and substrate cleaning system

Miyako Kaneko; Takehiko Orii; Itaru Kanno


Archive | 2014

Substrate processing method, pretreatment apparatus, post-treatment apparatus, substrate processing system and storage medium

菅野 至; Itaru Sugano; 至 菅野; 都 金子; Miyako Kaneko; 折居 武彦; Takehiko Orii; 武彦 折居


Archive | 2011

Etching method, etching apparatus, and memory medium

Tsukasa Watanabe; Keisuke Egashira; Miyako Kaneko; Takehiko Orii


Archive | 2016

Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method, and storage medium

都 金子; Miyako Kaneko; 折居 武彦; Takehiko Orii; 武彦 折居; 志村 悟; Satoru Shimura; 悟 志村; 剛秀 山下; Takehide Yamashita; 菅野 至; Itaru Sugano; 至 菅野


Archive | 2016

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING SYSTEM, SUBSTRATE CLEANING METHOD AND MEMORY MEDIUM

Miyako Kaneko; Takehiko Orii; Satoru Shimura; Masami Yamashita; Itaru Kanno


Archive | 2015

Substrate cleaning method, substrate cleaning system

Satoru Tanaka; Takehiko Orii; Meitoku Aibara; Miyako Kaneko; Keiji Tanouchi; Itaru Kanno


Archive | 2015

Substrate cleaning method, substrate cleaning system and storage medium

明徳 相原; Akinori Aihara; 田中 暁; Akira Tanaka; 暁 田中; 都 金子; Miyako Kaneko; 啓士 田内; Hiroshi Tauchi; 折居 武彦; Takehiko Orii; 武彦 折居; 菅野 至; Itaru Sugano; 至 菅野

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