Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Mohan Mahadevan is active.

Publication


Featured researches published by Mohan Mahadevan.


Archive | 2008

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

Kris Bhaskar; Chetana Bhaskar; Ashok Kulkarni; Eliezer Rosengaus; Cecelia Campochiaro; Chris Maher; Brian Duffy; Aneesh Khullar; Alpa Kohli; Lalita A. Balasubramanian; Santosh Bhattacharyya; Mohan Mahadevan


Archive | 2010

Systems and methods for detecting defects on a wafer

Lu Chen; Jason Kirkwood; Mohan Mahadevan; James A. Smith; Lisheng Gao; Junqing Huang; Tao Luo; Richard Wallingford


Archive | 2012

Automated Inspection Scenario Generation

Mohan Mahadevan; Govind Thattaisundaram; Ajay Gupta; Chien-Huei Chen; Jason Kirkwood; Ashok Kulkarni; Songnian Rong; Ernesto Escorcia; Eugene Shifrin


Archive | 2015

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Lena Nicolaides; Ben-ming Benjamin Tsai; Prashant Aji; Michael Gasvoda; Stanley E. Stokowski; Guoheng Zhao; Youxian Wen; Mohan Mahadevan; Paul Horn; Wolfgang Vollrath; Isabella T. Lewis


Archive | 2015

Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput

Himanshu Vajaria; Tommaso Torelli; Bradley Ries; Mohan Mahadevan


Archive | 2015

AUTOMATED INLINE INSPECTION AND METROLOGY USING SHADOW-GRAM IMAGES

Himanshu Vajaria; Sina Jahanbin; Bradley Ries; Mohan Mahadevan


Archive | 2015

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOTOTHERMAL INSPECTION

Lena Nicolaides; Mohan Mahadevan; Alex Salnik; Scott Young


Archive | 2011

Data Perturbation for Wafer Inspection or Metrology Setup

Govind Thattaisundaram; Mohan Mahadevan; Ajay Gupta; Chien-Huei Adam Chen; Ashok Kulkarni; Jason Kirkwood; Kenong Wu; Songnian Rong


Archive | 2017

ACCELERATING SEMICONDUCTOR-RELATED COMPUTATIONS USING LEARNING BASED MODELS

Kris Bhaskar; Scott Young; Mark J. Roulo; Jing Zhang; Laurent Karsenti; Mohan Mahadevan; Bjorn Brauer


Archive | 2015

AUTOMATED IMAGE-BASED PROCESS MONITORING AND CONTROL

Himanshu Vajaria; Shabnam Ghadar; Tommaso Torelli; Bradley Ries; Mohan Mahadevan; Stilian Pandev

Collaboration


Dive into the Mohan Mahadevan's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge