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Mohan Mahadevan

KLA-Tencor

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Publication

Featured researches published by Mohan Mahadevan.

Archive | 2008

Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions

Kris Bhaskar; Chetana Bhaskar; Ashok Kulkarni; Eliezer Rosengaus; Cecelia Campochiaro; Chris Maher; Brian Duffy; Aneesh Khullar; Alpa Kohli; Lalita A. Balasubramanian; Santosh Bhattacharyya; Mohan Mahadevan

Archive | 2010

Systems and methods for detecting defects on a wafer

Lu Chen; Jason Kirkwood; Mohan Mahadevan; James A. Smith; Lisheng Gao; Junqing Huang; Tao Luo; Richard Wallingford

Archive | 2012

Automated Inspection Scenario Generation

Mohan Mahadevan; Govind Thattaisundaram; Ajay Gupta; Chien-Huei Chen; Jason Kirkwood; Ashok Kulkarni; Songnian Rong; Ernesto Escorcia; Eugene Shifrin

Archive | 2015

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Lena Nicolaides; Ben-ming Benjamin Tsai; Prashant Aji; Michael Gasvoda; Stanley E. Stokowski; Guoheng Zhao; Youxian Wen; Mohan Mahadevan; Paul Horn; Wolfgang Vollrath; Isabella T. Lewis

Archive | 2015

Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput

Himanshu Vajaria; Tommaso Torelli; Bradley Ries; Mohan Mahadevan

Archive | 2015

AUTOMATED INLINE INSPECTION AND METROLOGY USING SHADOW-GRAM IMAGES

Himanshu Vajaria; Sina Jahanbin; Bradley Ries; Mohan Mahadevan

Archive | 2015

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOTOTHERMAL INSPECTION

Lena Nicolaides; Mohan Mahadevan; Alex Salnik; Scott Young

Archive | 2011

Data Perturbation for Wafer Inspection or Metrology Setup

Govind Thattaisundaram; Mohan Mahadevan; Ajay Gupta; Chien-Huei Adam Chen; Ashok Kulkarni; Jason Kirkwood; Kenong Wu; Songnian Rong

Archive | 2017

ACCELERATING SEMICONDUCTOR-RELATED COMPUTATIONS USING LEARNING BASED MODELS

Kris Bhaskar; Scott Young; Mark J. Roulo; Jing Zhang; Laurent Karsenti; Mohan Mahadevan; Bjorn Brauer

Archive | 2015

AUTOMATED IMAGE-BASED PROCESS MONITORING AND CONTROL

Himanshu Vajaria; Shabnam Ghadar; Tommaso Torelli; Bradley Ries; Mohan Mahadevan; Stilian Pandev

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Jason Kirkwood

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Lena Nicolaides

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Ashok Kulkarni

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Paul Horn

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Ajay Gupta

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Govind Thattaisundaram

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Shifang Li

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Songnian Rong

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Timothy Goodwin

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Bradley Ries

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