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Momtchil Stavrev

Infineon Technologies

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Publication

Featured researches published by Momtchil Stavrev.

Archive | 2004

Method for fabricating a contact hole plane in a memory module

Hans-Georg Fröhlich; Oliver Genz; Werner Graf; Stefan Gruss; Matthias Handke; Percy Heger; Lars Heineck; Antje Laessig; Alexander Reb; Kristin Schupke; Momtchil Stavrev; Mirko Vogt

Archive | 2005

Method for production of a semiconductor structure

Oliver Genz; Markus Kirchhoff; Stephan Machill; Alexander Reb; Barbara Schmidt; Momtchil Stavrev; Maik Stegemann; Stephan Wege

Microelectronic Engineering | 2005

Carbon hard masks for etching sub-90nm structures

Kevin Pears; Momtchil Stavrev; Alessia Scire; Ralf Koepe; Matthias Markert; Ulrich Egger; Lee Donohue

Archive | 2004

Process for producing an etching mask on a microstructure, in particular a semiconductor structure with trench capacitors, and corresponding use of the etching mask

Hans-Peter Moll; Momtchil Stavrev; Mirko Vogt; Stephan Wege

Archive | 2005

Silicon substrate isolation trenches etching method for use during manufacturing of DRAM cells, involves aligning etching gas components such that etching depth at two different sized upper surface sections of substrate has same size

Frank Ludwig; Kevin Pears; Alessia Scire; Momtchil Stavrev; Kimberly Wilson

Archive | 2003

Verfahren zum Herstellen einer Ätzmaske auf einer Mikrostruktur, insbesondere einer Halbleiterstruktur mit Grabenkondensatoren, und entsprechende Verwendung der Ätzmaske

Hans-Peter Moll; Momtchil Stavrev; Mirko Vogt; Stefan Wege

Archive | 2005

Production of insulating regions in semiconductor memories comprises forming a hard mask with openings in a region of a stronger electrical insulation and in a region of a weaker electrical insulation on a substrate, and further processing

Franz Schuler; Momtchil Stavrev; Christoph Ludwig; Nikolaos Hatzopoulos

Archive | 2005

A method of etching depressions in a silicon substrate

Frank Ludwig; Kevin Pears; Alessia Scire; Momtchil Stavrev; Kimberly Wilson

Archive | 2004

Manufacturing method of semiconductor structure

Genz Oliver; Kirchhoff Markus; Machill Stefan; Reb Alexander; Schmidt Barbara; Momtchil Stavrev; Maik Stegemann; Stephan Wege

Archive | 2003

Manufacturing method of a semiconductor structure

Oliver Genz; Markus Kirchhoff; Stefan Machill; Alexander Reb; Barbara Schmidt; Momtchil Stavrev; Maik Stegemann; Stephan Wege

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Collaboration

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Oliver Genz

Infineon Technologies

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Stephan Wege

Infineon Technologies

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Alexander Reb

Infineon Technologies

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Maik Stegemann

Infineon Technologies

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Mirko Vogt

Infineon Technologies

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Alessia Scire

Infineon Technologies

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Barbara Schmidt

Infineon Technologies

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Hans-Peter Moll

Infineon Technologies

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Kevin Pears

Infineon Technologies

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Markus Kirchhoff

Infineon Technologies

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