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Motohiko Yoshigai

Hitachi

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Publication

Featured researches published by Motohiko Yoshigai.

Archive | 2009

Microwave plasma processing device

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi

Archive | 2001

Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method

Tatehito Usui; Takashi Fujii; Motohiko Yoshigai; Tetsunori Kaji

Archive | 1994

Plasma process apparatus including ground electrode with protection film

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi

Archive | 2002

Etching system and etching method

Akira Kagoshima; Motohiko Yoshigai; Hideyuki Yamamoto; Daisuke Shiraishi; Junichi Tanaka; Kenji Tamaki; Natsuyo Morioka

Archive | 2005

Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process

Tatehito Usui; Motohiko Yoshigai; Tsuoyoshi Yoshida; Hideyuki Yamamoto

Archive | 2007

Semiconductor fabricating apparatus with function of determining etching processing state

Tatehito Usui; Motohiko Yoshigai; Kazuhiro Jyouo; Tetsuo Ono

Archive | 2004

Method and apparatus for determining endpoint of semiconductor element fabricating process and method and apparatus for processing member to be processed

Tatehito Usui; Takashi Fujii; Motohiko Yoshigai; Tetsunori Kaji; Hideyuki Yamamoto

Archive | 1999

Vacuum treatment system and its stage

Masanori Kadotani; Saburo Kanai; Youichi Itou; Takashi Fujii; Hironobu Kawahara; Ryouji Hamasaki; Kazue Takahashi; Motohiko Yoshigai

Archive | 1999

Method for processing surface of sample

Tetsuo Ono; Takafumi Tokunaga; Tadashi Umezawa; Motohiko Yoshigai; Tatsumi Mizutani; Tokuo Kure; Masayuki Kojima; Takashi Sato; Yasushi Goto

Archive | 2002

Specimen surface processing method

Tetsuo Ono; Yasuhiro Nishimori; Takashi Sato; Naoyuki Kofuji; Masaru Izawa; Yasushi Goto; Ken Yoshioka; Hideyuki Kazumi; Tatsumi Mizutani; Tokuo Kure; Masayuki Kojima; Takafumi Tokunaga; Motohiko Yoshigai

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Collaboration

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Tetsuo Ono

Hitachi

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Masayuki Kojima

Hitachi

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Takashi Fujii

Murata Manufacturing

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Tatehito Usui

Hitachi

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Tetsunori Kaji

Hitachi

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Takafumi Tokunaga

Hitachi

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Takashi Sato

Hitachi

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Tatsumi Mizutani

Hitachi

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Tokuo Kure

Hitachi

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Yasushi Goto

Hitachi

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