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Tetsunori Kaji

Hitachi

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Publication

Featured researches published by Tetsunori Kaji.

Archive | 1997

Device and method for plasma treatment

Tetsunori Kaji; Saburo Kanai; Satoshi Ito; Ryouji Hamasaki; Tetsuo Ono; Tatehito Usui; Kazue Takahashi; Kazutami Tago

Archive | 2006

Plasma etching apparatus and plasma etching method

Toshio Masuda; Kazue Takahashi; Mitsuru Suehiro; Tetsunori Kaji; Saburo Kanai

Archive | 1998

Plasma processing system and plasma processing method

Toshio Masuda; Katsuhiko Mitani; Tetsunori Kaji; Jyunichi Tanaka; Katsuya Watanabe; Shigeru Shirayone; Toru Otsubo; Ichiro Sasaki; Hideshi Fukumoto; Makoto Koizumi

Archive | 2009

Microwave plasma processing device

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi

Archive | 1999

Plasma processing apparatus and a plasma processing method

Kazue Takahashi; Toshio Masuda; Tetsunori Kaji; Ken’etsu Yokogawa

Archive | 2001

Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method

Tatehito Usui; Takashi Fujii; Motohiko Yoshigai; Tetsunori Kaji

Archive | 1994

Plasma process apparatus including ground electrode with protection film

Tetsunori Kaji; Takashi Fujii; Motohiko Yoshigai; Yoshinao Kawasaki; Masaharu Nishiumi

Archive | 1995

Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum

Tetsunori Kaji; Saburo Kanai; Satoshi Ito; Ryoji Hamasaki; Tetsuo Ono; Tatehito Usui; Kazue Takahashi; Kazutami Tago

Archive | 1973

Driving apparatus for display element

Tetsunori Kaji; Seiichi Murayama

Archive | 2002

System for producing wafers

Tetsunori Kaji; Yoichi Uchimaki; Yuko Egawa

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Tatehito Usui

Hitachi

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Yoshinao Kawasaki

Hitachi

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Keizo Suzuki

Hitachi

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Seiichi Watanabe

Hitachi

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Takashi Fujii

Hitachi

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Yoshifumi Ogawa

Hitachi

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Kazuo Nojiri

Hitachi

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Yutaka Kakehi

Hitachi

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Hiromichi Enami

Hitachi

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Kazue Takahashi

Hitachi

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