Mutsuo Nakajima | Researchain

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Archive | 1999

New ester compound, high polymer compound, resist material and pattern-forming method

Koji Hasegawa; Jun Hatakeyama; Takeshi Kanou; Hideshi Kurihara; Mutsuo Nakajima; Tsunehiro Nishi; Takanobu Takeda; Osamu Watanabe; Takeshi Watanabe; 睦雄中島; 英志栗原; 隆信武田; 修渡辺; 武渡辺; 畠山潤; 恒寛西; 剛金生; 幸士長谷川

Archive | 2007

Composition for forming metal oxide-containing film, metal oxide-containing film, substrate having metal oxide-containing film formed thereon, and pattern formation method using the same

Mutsuo Nakajima; Tsutomu Ogiwara; Takashi Ueda; Toshiharu Yano; 貴史上田; 睦雄中島; 俊治矢野; 勤荻原

Archive | 1998

Polymeric silicone compound, resist material and pattern formation

Jun Hatakeyama; Toshinobu Ishihara; Ichiro Kaneko; Shigehiro Nagura; Mutsuo Nakajima; Junji Tsuchiya; 睦雄中島; 茂広名倉; 純司土谷; 畠山潤; 俊信石原; 一郎金子

Archive | 1998

Macromolecular silicone, chemically amplifiable positive type resist material and pattern-formation process

Jun Hatakeyama; Toshinobu Ishihara; Ichiro Kaneko; Shigehiro Nagura; Mutsuo Nakajima; Junji Tsuchiya; 睦雄中島; 茂広名倉; 純司土谷; 畠山潤; 俊信石原; 一郎金子

Archive | 2002

High-molecular compound, resist material and method for forming pattern

Koji Hasegawa; Jun Hatakeyama; Takeshi Kanou; Mutsuo Nakajima; Tsunehiro Nishi; Seiichiro Tachibana; Takeshi Watanabe; 睦雄中島; 誠一郎橘; 武渡辺; 畠山潤; 恒寛西; 剛金生; 幸士長谷川

Archive | 2007

PHOTORESIST UNDERLAY FILM MATERIAL, PHOTORESIST UNDERLAY FILM SUBSTRATE, AND PATTERN FORMING METHOD

Jun Hatakeyama; Mutsuo Nakajima; Tsutomu Ogiwara; 睦雄中島; 畠山潤; 勤荻原

Archive | 2003

Silicon-containing polymeric compound, resist material and method of pattern formation

Jun Hatakeyama; Mutsuo Nakajima; 睦雄中島; 潤畠山

Archive | 2006

SILSESQUIOXANE-BASED COMPOUND MIXTURE, METHOD FOR PRODUCING THE SAME MIXTURE AND RESIST COMPOSITION AND PATTERNING METHOD EACH USING THE SAME MIXTURE

Yoshitaka Hamada; Mutsuo Nakajima; Kazumi Noda; Katsuya Takemura; 睦雄中島; 吉隆濱田; 勝也竹村; 和美野田

Archive | 2003

Ester compound and method for manufacturing it and polymer compound

Koji Hasegawa; Jun Hatakeyama; Takeshi Kanou; Hideshi Kurihara; Mutsuo Nakajima; Tsunehiro Nishi; Takanobu Takeda; Osamu Watanabe; Takeshi Watanabe; 中島睦雄; 栗原英志; 武田隆信; 渡辺修; 渡辺武; 畠山潤; 西恒寛; 金生剛; 長谷川幸士

Archive | 1999