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Tsunehiro Nishi

Shin-Etsu Chemical

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Publication

Featured researches published by Tsunehiro Nishi.

Archive | 2009

Positive resist composition and patterning process

Tsunehiro Nishi; Takeshi Kinsho; Masaki Ohashi; Koji Hasegawa; Masashi Iio

Archive | 2001

Ester compounds, polymers, resist compositions and patterning process

Takeru Watanabe; Takeshi Kinsho; Tsunehiro Nishi; Mutsuo Nakashima; Koji Hasegawa; Jun Hatakeyama

Archive | 1999

Lactone-containing compounds, polymers, resist compositions, and patterning method

Koji Hasegawa; Tsunehiro Nishi; Takeshi Kinsho; Jun Hatakeyama; Osamu Watanabe

Archive | 1999

New ester compound, high polymer compound, resist material and pattern-forming method

Koji Hasegawa; Jun Hatakeyama; Takeshi Kanou; Hideshi Kurihara; Mutsuo Nakajima; Tsunehiro Nishi; Takanobu Takeda; Osamu Watanabe; Takeshi Watanabe; 睦雄 中島; 英志 栗原; 隆信 武田; 修 渡辺; 武 渡辺; 畠山 潤; 恒寛 西; 剛 金生; 幸士 長谷川

Archive | 2009

Positive resist compositions and patterning process

Tsunehiro Nishi; Takeshi Kinsho

Archive | 2003

Resist material and patterning process

Toshinobu Ishihara; Takeshi Kanou; Tomohiro Kobayashi; Shigehiro Nagura; Tsunehiro Nishi; Satoshi Watanabe; 茂広 名倉; 知洋 小林; 聡 渡邉; 俊信 石原; 恒寛 西; 剛 金生

Archive | 2009

Lactone-containing compound, polymer, resist composition, and patterning process

Koji Hasegawa; Satoshi Shinachi; Katsuhiro Kobayashi; Tsunehiro Nishi; Takeshi Kinsho

Archive | 2000

Acid-decomposable ester compound suitable for use in resist material

Takeshi Kinsho; Tsunehiro Nishi; Takeru Watanabe; Koji Hasegawa; Mutsuo Nakashima; Jun Hatakeyama

Archive | 1998

Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation

Tsunehiro Nishi; Jun Hatakeyama; Shigehiro Nagura; Toshinobu Ishihara

Archive | 2009

Double patterning process

Katsuya Takemura; Tsunehiro Nishi; Jun Hatakeyama; Masaki Ohashi; Takeshi Kinsho

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Collaboration

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Koji Hasegawa

Shin-Etsu Chemical

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Takeshi Kinsho

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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Seiichiro Tachibana

Shin-Etsu Chemical

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Mutsuo Nakashima

Shin-Etsu Chemical

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Masaki Ohashi

Shin-Etsu Chemical

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Osamu Watanabe

Shin-Etsu Chemical

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Satoshi Watanabe

Shin-Etsu Chemical

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Shigehiro Nagura

Shin-Etsu Chemical

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