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Mutsuo Nakashima

Shin-Etsu Chemical

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Publication

Featured researches published by Mutsuo Nakashima.

Archive | 2001

Ester compounds, polymers, resist compositions and patterning process

Takeru Watanabe; Takeshi Kinsho; Tsunehiro Nishi; Mutsuo Nakashima; Koji Hasegawa; Jun Hatakeyama

Archive | 2001

High molecular weight silicone compounds resist compositions, and patterning method

Mutsuo Nakashima; Ichiro Kaneko; Toshinobu Ishihara; Junji Tsuchiya; Jun Hatakeyama; Shigehiro Nagura

Archive | 2000

Acid-decomposable ester compound suitable for use in resist material

Takeshi Kinsho; Tsunehiro Nishi; Takeru Watanabe; Koji Hasegawa; Mutsuo Nakashima; Jun Hatakeyama

Archive | 1998

High molecular weight silicone compound, chemically amplified positive resist composition and patterning method

Ichiro Kaneko; Mutsuo Nakashima; Toshinobu Ishihara; Junji Tsuchiya; Jun Hatakeyama; Shigehiro Nagura

Archive | 2002

Cyclic acetal compound, polymer, resist composition and patterning process

Mutsuo Nakashima; Seiichiro Tachibana; Takeru Watanabe; Takeshi Kinsho; Koji Hasegawa; Tsunehiro Nishi; Jun Hatakeyama

Archive | 2000

Polymers, chemical amplification resist compositions and patterning process

Jun Hatakeyama; Yuji Harada; Jun Watanabe; Mutsuo Nakashima

Archive | 1995

Silacyclohexane compound, a method of preparing it and a liquid crystal composition containing it

Mutsuo Nakashima; Takaaki Shimizu; Tsutomu Ogihara; Takeshi Kinsho; Tatsushi Kaneko; Hideshi Kurihara

Archive | 2008

Metal oxide-containing film-forming composition, metal oxide-containing film, metal oxide-containing film-bearing substrate, and patterning method

Tsutomu Ogihara; Takafumi Ueda; Toshiharu Yano; Mutsuo Nakashima

Archive | 2004

Positive resist material and pattern formation method using the same

Yoshitaka Hamada; Fujio Yagihashi; Mutsuo Nakashima; Kazumi Noda; Katsuya Takemura

Archive | 1996

Silacyclohexane compounds, preparation thereof liquid crystal compositions comprising the same, and liquid crystal devices comprising the composition

Takaaki Shimizu; Tsutomu Ogihara; Tatsushi Kaneko; Kazuyuki Asakura; Takeshi Kinsho; Mutsuo Nakashima

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Collaboration

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Takeshi Kinsho

Shin-Etsu Chemical

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Tsutomu Ogihara

Shin-Etsu Chemical

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Takaaki Shimizu

Shin-Etsu Chemical

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Tatsushi Kaneko

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Koji Hasegawa

Shin-Etsu Chemical

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Tsunehiro Nishi

Shin-Etsu Chemical

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Takeru Watanabe

Shin-Etsu Chemical

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Hideshi Kurihara

Shin-Etsu Chemical

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Kazuyuki Asakura

Shin-Etsu Chemical

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