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Takeru Watanabe

Shin-Etsu Chemical

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Publication

Featured researches published by Takeru Watanabe.

Archive | 2017

Resist composition and patterning process

Satoshi Watanabe; Akinobu Tanaka; Takeru Watanabe; Takeshi Kinsho

Archive | 2001

Ester compounds, polymers, resist compositions and patterning process

Takeru Watanabe; Takeshi Kinsho; Tsunehiro Nishi; Mutsuo Nakashima; Koji Hasegawa; Jun Hatakeyama

Archive | 2007

Sulfonium salt having polymerizable anion, polymer, resist composition, and patterning process

Youichi Ohsawa; Masaki Ohashi; Seiichiro Tachibana; Jun Hatakeyama; Takeru Watanabe

Archive | 2006

RESIST PROTECTIVE FILM MATERIAL AND PATTERN FORMATION METHOD

Jun Hatakeyama; Yuji Harada; Takeru Watanabe

Archive | 2006

Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process

Katsuhiro Kobayashi; Youichi Ohsawa; Takeshi Kinsho; Takeru Watanabe

Archive | 2009

Photoacid generator, resist composition, and patterning process

Masaki Ohashi; Youichi Ohsawa; Takeshi Kinsho; Takeru Watanabe

Archive | 2011

Resist underlayer film composition and patterning process using the same

Tsutomu Ogihara; Daisuke Kori; Yusuke Biyajima; Takeru Watanabe; Toshihiko Fujii; Takeshi Kinsho

Archive | 2000

Acid-decomposable ester compound suitable for use in resist material

Takeshi Kinsho; Tsunehiro Nishi; Takeru Watanabe; Koji Hasegawa; Mutsuo Nakashima; Jun Hatakeyama

Archive | 2002

Cyclic acetal compound, polymer, resist composition and patterning process

Mutsuo Nakashima; Seiichiro Tachibana; Takeru Watanabe; Takeshi Kinsho; Koji Hasegawa; Tsunehiro Nishi; Jun Hatakeyama

Archive | 2003

Novel ester compounds, polymers, resist compositions and patterning process

Koji Hasegawa; Tsunehiro Nishi; Takeshi Kinsho; Takeru Watanabe; Matsuo Nakashima; Seiichiro Tachibana; Jun Hatakeyama

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Collaboration

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Takeshi Kinsho

Shin-Etsu Chemical

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Koji Hasegawa

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Tsunehiro Nishi

Shin-Etsu Chemical

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Seiichiro Tachibana

Shin-Etsu Chemical

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Mutsuo Nakashima

Shin-Etsu Chemical

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Masaki Ohashi

Shin-Etsu Chemical

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Tomohiro Kobayashi

Shin-Etsu Chemical

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Tsutomu Ogihara

Shin-Etsu Chemical

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Youichi Ohsawa

Shin-Etsu Chemical

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