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Nagai Tomoki

Tokyo Electron

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Publication

Featured researches published by Nagai Tomoki.

Archive | 2009

Resin composition for formation of fine pattern, and method for formation of fine pattern

Abe Takayoshi; Sugiura Makoto; Nagai Tomoki; Nakamura Atsushi; Wakamatsu Gouji; Anno Yuusuke

Archive | 2016

PHOTORESIST COMPOSITION, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Shiratani Motohiro; Naruoka Takehiko; Nagai Tomoki

Archive | 2015

COMPOSITION FOR PATTERN FORMATION, AND METHOD FOR FORMING PATTERN

Komatsu Hiroyuki; Minegishi Shinya; Naruoka Takehiko; Nagai Tomoki

Archive | 2015

PATTERNING METHOD AND SELF-ORGANIZATION COMPOSITION

Minegishi Shinya; Naruoka Takehiko; Nagai Tomoki

Archive | 2012

RESIST PATTERN FORMATION METHOD

Nakamura Atsushi; Nagai Tomoki; Abe Takayoshi; Kakizawa Tomohiro

Archive | 2009

Method for forming resist pattern and resin composition for insolubilizing formed resist patterns using therefor

Nakamura Atsushi; Nagai Tomoki; Abe Takayoshi; Kakizawa Tomohiro

Archive | 2009

PATTERN FORMATION METHOD AND RESIN COMPOSITION FOR FINE PATTERN FORMATION

Abe Takeyoshi; Kakizawa Tomohiro; Nakamura Atsushi; Nagai Tomoki

Archive | 2017

Radiation-sensitive composition, pattern forming method and radiation-sensitive acid generator

Nagai Tomoki; Naruoka Takehiko; Maruyama Ken; Shiratani Motohiro; Nakagawa Hisashi

Archive | 2017

METHOD FOR FORMING CONTACT HOLE PATTERN AND COMPOSITION

Komatsu Hiroyuki; Oda Tomohiro; Hori Masafumi; Naruoka Takehiko; Nagai Tomoki

Archive | 2017

CHEMICALLY AMPLIFIED RESIST MATERIAL AND PROCESS FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Naruoka Takehiko; Nagai Tomoki

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Naruoka Takehiko

Tokyo Electron

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Nakagawa Hisashi

Osaka University

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Nagahara Seiji

Tokyo Electron

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Oshima Akihiro

Tokai University

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Tagawa Seiichi

Japan Atomic Energy Agency

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