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Nakagawa Hisashi

Osaka University

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Publication

Featured researches published by Nakagawa Hisashi.

Archive | 2016

PHOTORESIST COMPOSITION, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Shiratani Motohiro; Naruoka Takehiko; Nagai Tomoki

Archive | 2016

RADIATION-SENSITIVE COMPOSITION AND PATTERN-FORMING METHOD

Shiratani Motohiro; Naruoka Takehiko; Nakagawa Hisashi

Archive | 2016

PATTERN FORMATION PROCESS

Nakagawa Hisashi; Naruoka Takehiko; Shiratani Motohiro

Archive | 2018

RADIATION SENSITIVE COMPOSITION, PATTERN FORMING METHOD AND METAL OXIDE

Minegishi Shinya; 峯岸 信也; Shiratani Motohiro; 白谷 宗大; Asano Yusuke; 浅野 裕介; Nakagawa Hisashi; 中川 恭志; Naruoka Takehiko; 成岡 岳彦

Archive | 2018

RADIATION-SENSITIVE COMPOSITION, PATTERN FORMATION METHOD, AND METAL-CONTAINING RESIN AND METHOD FOR MANUFACTURING SAME

Asano Yusuke; 浅野 裕介; Nakagawa Hisashi; 中川 恭志; Minegishi Shinya; 峯岸 信也

Archive | 2017

Radiation-sensitive composition, pattern forming method and radiation-sensitive acid generator

Nagai Tomoki; Naruoka Takehiko; Maruyama Ken; Shiratani Motohiro; Nakagawa Hisashi

Archive | 2017

CHEMICALLY AMPLIFIED RESIST MATERIAL AND PROCESS FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Naruoka Takehiko; Nagai Tomoki

Archive | 2017

PROCESS FOR FORMING RESIST PATTERN AND CHEMICALLY AMPLIFIED RADIATION-SENSITIVE RESIN COMPOSITION

Nakagawa Hisashi; Naruoka Takehiko; Nagai Tomoki

Archive | 2017

CHEMICALLY AMPLIFIED RESIST MATERIAL AND METHOD FOR FORMING RESIST PATTERN

Tagawa Seiichi; Oshima Akihiro; Nagahara Seiji; Nakagawa Hisashi; Naruoka Takehiko; Nagai Tomoki

Archive | 2017

PROCESS FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Naruoka Takehiko; Nagai Tomoki

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Collaboration

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Naruoka Takehiko

Tokyo Electron

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Nagai Tomoki

Tokyo Electron

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Nagahara Seiji

Tokyo Electron

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Oshima Akihiro

Tokai University

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Tagawa Seiichi

Japan Atomic Energy Agency

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