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Naruoka Takehiko

Tokyo Electron

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Publication

Featured researches published by Naruoka Takehiko.

Archive | 2009

Radiation-sensitive resin composition, method for forming resist pattern and photoresist film

Matsumura Nobuji; Soyano Akimasa; Asano Yuusuke; Naruoka Takehiko; Sakakibara Hirokazu; Shimizu Makoto; Nishimura Yukio; Kasahara Kazuki; Nakagawa Hiroki; Sugiura Makoto; Shimokawa Tsutomu

Archive | 2016

PHOTORESIST COMPOSITION, METHOD FOR MANUFACTURING SAME, AND METHOD FOR FORMING RESIST PATTERN

Nakagawa Hisashi; Shiratani Motohiro; Naruoka Takehiko; Nagai Tomoki

Archive | 2016

RADIATION-SENSITIVE COMPOSITION AND PATTERN-FORMING METHOD

Shiratani Motohiro; Naruoka Takehiko; Nakagawa Hisashi

Archive | 2010

RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, AND BLOCK COPOLYMER

Asano Yusuke; Nishimura Yukio; Kawakami Mineki; Matsumura Shinji; Sakakibara Hirokazu; Naruoka Takehiko

Archive | 2016

PATTERN FORMATION PROCESS

Nakagawa Hisashi; Naruoka Takehiko; Shiratani Motohiro

Archive | 2015

COMPOSITION FOR PATTERN FORMATION, AND METHOD FOR FORMING PATTERN

Komatsu Hiroyuki; Minegishi Shinya; Naruoka Takehiko; Nagai Tomoki

Archive | 2015

PATTERNING METHOD AND SELF-ORGANIZATION COMPOSITION

Minegishi Shinya; Naruoka Takehiko; Nagai Tomoki

Archive | 2010

Compounds, fluorine-containing polymers, and radiation -sensitive resin compositions

Matsumura Nobuji; Asano Yuusuke; Sakakibara Hirokazu; Nishimura Yukio; Naruoka Takehiko

Archive | 2018

RADIATION SENSITIVE COMPOSITION, PATTERN FORMING METHOD AND METAL OXIDE

Minegishi Shinya; 峯岸 信也; Shiratani Motohiro; 白谷 宗大; Asano Yusuke; 浅野 裕介; Nakagawa Hisashi; 中川 恭志; Naruoka Takehiko; 成岡 岳彦

Archive | 2018

COMPOSITION, MODIFICATION METHOD AND SELECTIVE MODIFICATION METHOD FOR SUBSTRATE SURFACES, PATTERN FORMATION METHOD, AND POLYMER

Komatsu Hiroyuki; Oda Tomohiro; Hori Masafumi; Osaki Hitoshi; Naruoka Takehiko

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Nagai Tomoki

Tokyo Electron

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Nakagawa Hisashi

Osaka University

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Nagahara Seiji

Tokyo Electron

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Oshima Akihiro

Tokai University

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Tagawa Seiichi

Japan Atomic Energy Agency

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