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Naoto Nakashima

Hitachi

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Publication

Featured researches published by Naoto Nakashima.

Archive | 1984

Exposure apparatus and method of aligning exposure mask with workpiece

Yoshitada Oshida; Masataka Shiba; Toshihiko Nakata; Mitsuyoshi Koizumi; Naoto Nakashima

Archive | 1987

Illumination apparatus for exposure

Yasuhiro Yoshitake; Yoshitada Oshida; Masataka Shiba; Naoto Nakashima

Archive | 1988

Method and apparatus for optical alignment of semiconductor by using a hologram

Yoshitada Oshida; Naoto Nakashima; Yasuhiro Yoshitake

Archive | 1989

Method and apparatus for pattern detection

Yoshitada Oshida; Yasuhiro Yoshitake; Naoto Nakashima; Masataka Shiba

Archive | 1985

Semiconductor exposure apparatus and alignment method therefor

Yoshitada Oshida; Masataka Shiba; Naoto Nakashima; Toshihiko Nakata; Sachio Uto

Archive | 1986

Alignment detection optical system of projection type aligner

Yoshitada Oshida; Naoto Nakashima; Toshihiko Nakata

Archive | 1986

Reduction projection system alignment method and apparatus

Naoto Nakashima; Yoshitada Oshida

Archive | 1987

Beleuchtungsapparat fuer belichtung.

Yasuhiro Yoshitake; Yoshitada Oshida; Masataka Shiba; Naoto Nakashima

Archive | 1987

Beleuchtungsapparat für Belichtung. Lighting apparatus for exposure.

Yasuhiro Yoshitake; Yoshitada Oshida; Masataka Shiba; Naoto Nakashima

Archive | 1987

Beleuchtungsapparat fuer belichtung. Lighting apparatus for imaging.

Yasuhiro Yoshitake; Yoshitada Oshida; Masataka Shiba; Naoto Nakashima

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Collaboration

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Yoshitada Oshida

Hitachi

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Masataka Shiba

Hitachi

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Yasuhiro Yoshitake

Hitachi

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Toshihiko Nakata

Hitachi

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Mitsuyoshi Koizumi

Hitachi

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Sachio Uto

Hitachi

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