Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

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Dive into the research topics where Sachio Uto is active.

Publication


Featured researches published by Sachio Uto.


Archive | 2004

Defect inspection method and apparatus therefor

Shunji Maeda; Atsushi Yoshida; Yukihiro Shibata; Minoru Yoshida; Sachio Uto; Hiroaki Shishido; Toshihiko Nakata


Archive | 2006

Method And Apparatus For Detecting Defects

Hiroyuki Nakano; Toshihiko Nakata; Sachio Uto; Akira Hamamatsu; Shunji Maeda; Yuta Urano


Archive | 2002

Laser annealing apparatus, TFT device and annealing method of the same

Mikio Hongo; Sachio Uto; Mineo Nomoto; Toshihiko Nakata; Mutsuko Hatano; Shinya Yamaguchi; Makoto Ohkura


Archive | 2011

Apparatus and method for inspecting pattern

Sachio Uto; Minoru Yoshida; Toshihiko Nakata; Shunzi Maeda; Atsushi Shimoda


Archive | 2012

Inspection method and inspection apparatus

Akira Hamamatsu; Minori Noguchi; Hidetoshi Nishiyama; Yoshimasa Ohshima; Takahiro Jingu; Sachio Uto


Archive | 2003

Display device, process of fabricating same, and apparatus for fabricating same

Mikio Hongo; Sachio Uto; Mineo Nomoto; Toshihiko Nakata; Mutsuko Hatano; Shinya Yamaguchi; Makoto Ohkura


Archive | 2000

Method and apparatus for inspecting defects in a patterned specimen

Shunji Maeda; Atsushi Yoshida; Yukihiro Shibata; Toshihiko Nakata; Hiroaki Shishido; Minoru Yoshida; Sachio Uto


Archive | 1983

Foreign particle detecting method and apparatus

Masataka Shiba; Sachio Uto; Mitsuyoshi Koizumi


Archive | 2003

Defect detector and defect detecting method

Sachio Uto; Minori Noguchi; Hidetoshi Nishiyama; Yoshimasa Ohshima; Akira Hamamatsu; Takahiro Jingu; Toshihiko Nakata; Masahiro Watanabe


Archive | 2010

Method and equipment for detecting pattern defect

Hiroaki Shishido; Yasuhiro Yoshitake; Toshihiko Nakata; Shunji Maeda; Minoru Yoshida; Sachio Uto

Collaboration


Dive into the Sachio Uto's collaboration.

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