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Dive into the research topics where Noboru Otani is active.

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Featured researches published by Noboru Otani.


Archive | 2005

Epitaxial silicon carbide single crystal substrate and its manufacturing method

Takashi Aigo; Tatsuo Fujimoto; Masakazu Katsuno; Masashi Nakabayashi; Noboru Otani; Mitsuru Sawamura; Hiroshi Tsuge; Hirokatsu Yashiro; 正史 中林; 正和 勝野; 昇 大谷; 弘志 柘植; 充 澤村; 弘克 矢代; 崇 藍郷; 辰雄 藤本


Archive | 1996

SINGLE CRYSTAL SILICON CARBIDE INGOT AND ITS PRODUCTION

Masatoshi Kanetani; Masakazu Katsuno; Kozo Onoe; Noboru Otani; Atsushi Takahashi; Hirokatsu Yashiro; 正和 勝野; 昇 大谷; 浩三 尾上; 弘克 矢代; 正敏 金谷; 淳 高橋


Archive | 2007

Low resistivity silicon carbide single-crystal substrate

Tatsuo Fujimoto; Masakazu Katsuno; Masashi Nakabayashi; Noboru Otani; Hirokatsu Yashiro; 正史 中林; 正和 勝野; 昇 大谷; 弘克 矢代; 辰雄 藤本


Archive | 2003

Silicon carbide single crystal ingot and its producing method

Takashi Aigo; Tatsuo Fujimoto; Taizo Hoshino; Masakazu Katsuno; Masashi Nakabayashi; Noboru Otani; Mitsuru Sawamura; Hiroshi Tsuge; Hirokatsu Yashiro; 正史 中林; 正和 勝野; 昇 大谷; 泰三 星野; 弘志 柘植; 充 澤村; 弘克 矢代; 崇 藍郷; 辰雄 藤本


Archive | 2002

Seed crystal for silicon carbide single crystal growth, silicon carbide single crystal ingot and method of manufacturing the same

Tatsuo Fujimoto; Masakazu Katsuno; Noboru Otani; Hirokatsu Yashiro; 勝野 正和; 大谷 昇; 矢代 弘克; 藤本 辰雄


Archive | 2005

Silicon carbide single crystal and method for manufacturing the same

Takashi Aigo; Tatsuo Fujimoto; Taizo Hoshino; Masakazu Katsuno; Masashi Nakabayashi; Noboru Otani; Mitsuru Sawamura; Hiroshi Tsuge; Hirokatsu Yashiro; 正史 中林; 正和 勝野; 昇 大谷; 泰三 星野; 弘志 柘植; 充 澤村; 弘克 矢代; 崇 藍郷; 辰雄 藤本


Archive | 2004

Silicon carbide raw material for growing silicon carbide single crystal, silicon carbide single crystal, and method for producing the same

Tatsuo Fujimoto; Masashi Nakabayashi; Noboru Otani; Mitsuru Sawamura; 正史 中林; 昇 大谷; 充 澤村; 辰雄 藤本


Archive | 2001

SILICON CARBIDE SINGLE CRYSTAL INGOT, PRODUCTION METHOD THEREFOR AND METHOD FOR MOUNTING SEED CRYSTAL FOR GROWING SILICON CARBIDE SINGLE CRYSTAL

Takashi Aigo; Tatsuo Fujimoto; Masakazu Katsuno; Noboru Otani; Hirokatsu Yashiro; 正和 勝野; 昇 大谷; 弘克 矢代; 崇 藍郷; 辰雄 藤本


Archive | 2002

Method of manufacturing silicon carbide single crystal wafer and silicon carbide single crystal wafer

Tatsuo Fujimoto; Masakazu Katsuno; Noboru Otani; Hirokatsu Yashiro; 勝野 正和; 大谷 昇; 矢代 弘克; 藤本 辰雄


Archive | 2008

Silicon carbide single crystal ingot and substrate and epitaxial wafer obtained from the same

Tatsuo Fujimoto; Masakazu Katsuno; Masashi Nakabayashi; Noboru Otani; Hiroshi Tsuge; 正史 中林; 正和 勝野; 昇 大谷; 弘志 柘植; 辰雄 藤本

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