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Noburu Shimizu

Ebara Corporation

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Publication

Featured researches published by Noburu Shimizu.

Archive | 2002

Method and apparatus for polishing workpiece

Noburu Shimizu; Norio Kimura

Archive | 1997

Method for polishing workpieces and apparatus therefor

Noburu Shimizu; Norio Kimura

Archive | 2007

Machining end point detecting method, grinding method, and grinder

Noburu Shimizu; Shinro Ohta; Koji Maruyama; Yoichi Kobayashi; Ryuichiro Mitani; Shunsuke Nakai; Atsushi Shigeta

Archive | 2000

Method for polishing workpieces using fixed abrasives

Kazuto Hirokawa; Hirokuni Hiyama; Yutaka Wada; Hisanori Matsuo; Noburu Shimizu

Archive | 1995

Revolving drum polishing apparatus

Masayoshi Hirose; Seiji Ishikawa; Norio Kimura; Yoshimi Sasaki; Kouki Yamada; Fujio Aoyama; Noburu Shimizu; Katsuya Okumura

Archive | 1984

Gas rotary machine

Hideki Kondo; Noburu Shimizu; Yoichi Kanemitsu

Archive | 2007

Processing end point detection method, polishing method,and polishing apparatus

Noburu Shimizu; Shinro Ohta; Koji Maruyama; Yoichi Kobayashi; Ryuichiro Mitani; Shunsuke Nakai; Atsushi Shigeta

Archive | 1993

Bearing lubricating structure for rotary machinery

Noburu Shimizu; Yasuhiro Niimura

Archive | 2009

Method of making diagram for use in selection of wavelength of light for polishing endpoint detection, method for selecting wavelength of light for polishing endpoint detection, and polishing endpoint detection method

Yoichi Kobayashi; Noburu Shimizu; Shinrou Ohta

Archive | 1997

Method of and apparatus for polishing and cleaning planar workpiece

Norio Kimura; Noburu Shimizu

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Collaboration

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Norio Kimura

Ebara Corporation

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Yoichi Kobayashi

Josai University

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Atsushi Shigeta

Ebara Corporation

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Kiyoshi Yanagisawa

Ebara Corporation

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Koji Maruyama

Ebara Corporation

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Ryuichiro Mitani

Ebara Corporation

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Shinro Ohta

Ebara Corporation

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Shunsuke Nakai

Ebara Corporation

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Yoichi Kanemitsu

Ebara Corporation

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Shinrou Ohta

Ebara Corporation

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