Is this you? Create Your Porfile
Avatar

Shunsuke Nakai

Ebara Corporation

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Shunsuke Nakai is active.

Explore More

Publication

Featured researches published by Shunsuke Nakai.

Archive | 2007

Machining end point detecting method, grinding method, and grinder

Noburu Shimizu; Shinro Ohta; Koji Maruyama; Yoichi Kobayashi; Ryuichiro Mitani; Shunsuke Nakai; Atsushi Shigeta

Archive | 2000

Substrate film thickness measurement method, substrate film thickness measurement apparatus and substrate processing apparatus

Toshifumi Kimba; Shunsuke Nakai

Archive | 2000

Method and apparatus for measuring film thickness

Toshifumi Kimba; Shunsuke Nakai

Archive | 2003

Polishing state monitoring device, polishing device and polishing method

Masuyoshi Ishimoto; Yoichi Kobayashi; Shunsuke Nakai; Kazuya Shinya; Hitoshi Tsuji; Yasuro Tsukuda; 俊輔 中井; 康郎 佃; 洋一 小林; 和也 新屋; 潤喜 石本; 仁志 辻

Archive | 2007

Processing end point detection method, polishing method,and polishing apparatus

Noburu Shimizu; Shinro Ohta; Koji Maruyama; Yoichi Kobayashi; Ryuichiro Mitani; Shunsuke Nakai; Atsushi Shigeta

Archive | 2009

Polishing state monitoring apparatus, polishing apparatus, and method of polishing

Masuyoshi Ishimoto; Yoichi Kobayashi; Shunsuke Nakai; Kazuya Shinya; Hitoshi Tsuji; Yasuro Tsukuda; 俊輔 中井; 康郎 佃; 洋一 小林; 和也 新屋; 潤喜 石本; 仁志 辻

Archive | 2007

Procédé de detection de point de fin d'usinage, procédé de rectification, et rectifieuse

Noburu Shimizu; Shinro Ohta; Koji Maruyama; Yoichi Kobayashi; Ryuichiro Mitani; Shunsuke Nakai; Atsushi Shigeta

Archive | 2004

Substratpoliergerät Substrate polishing machine

Kazuto Hirokawa; Yoichi Kobayashi; Shunsuke Nakai; Shinrou Ohta; Yasuo Tsukuda

Archive | 2000

Method and apparatus for substrate film thickness measurement and substrate processing

Toshifumi Kimba; Shunsuke Nakai

Archive | 2000

Verfahren und Vorrichtung für Schichtdickenmessung und Substratverarbeitung Method and apparatus for coating thickness measurement and substrate processing

Toshifumi Kimba; Shunsuke Nakai

Explore More

Collaboration

Dive into the Shunsuke Nakai's collaboration.

Top Co-Authors
Avatar

Toshifumi Kimba

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Yoichi Kobayashi

Josai University

View shared research outputs
Top Co-Authors
Avatar

Atsushi Shigeta

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Koji Maruyama

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Noburu Shimizu

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Ryuichiro Mitani

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Shinro Ohta

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hitoshi Tsuji

Shimadzu Corp.

View shared research outputs
Top Co-Authors
Avatar

Shinrou Ohta

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Yasuo Tsukuda

Shimadzu Corp.

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge