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Nobutake Nodera

Tokyo Electron

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Publication

Featured researches published by Nobutake Nodera.

Archive | 2009

Film formation method in vertical batch cvd apparatus

Masanobu Matsunaga; Nobutake Nodera; Kazuhide Hasebe

Archive | 2008

Film formation apparatus and method for using same

Nobutake Nodera; Jun Sato; Kazuya Yamamoto; Kazuhide Hasebe

Archive | 2007

Film formation apparatus and method for using the same

Nobutake Nodera; Kazuhide Hasebe; Kazuya Yamamoto

SID Symposium Digest of Technical Papers | 2016

67-1: Novel LTPS Technology for Large Substrate

Satoru Utsugi; Nobutake Nodera; Takao Matsumoto; Kazuki Kobayashi; Taimi Oketani

Archive | 1970

DEPOSITION METHOD AND APPARATUS

Pao-Hwa Chou; Kazuhide Hasebe; Masanobu Matsunaga; Nobutake Nodera; Koutai Umezawa; 保華 周; 正信 松永; 好太 梅澤; 伸武 野寺; 一秀 長谷部

Archive | 2017

Method for Manufacturing Thin Film Transistor, Thin Film Transistor and Display Panel

Nobutake Nodera; Shigeru Ishida; Ryohei Takakura; Yoshiaki Matsushima; Takao Matsumoto; Kazuki Kobayashi; Taimi Oketani

Archive | 2008

Vertical plasma processing apparatus and method for using same

Nobutake Nodera; Jun Sato; Masanobu Matsunaga; Kazuhide Hasebe; Hisashi Inoue

Archive | 2012

Vertical plasma processing apparatus and use method thereof

Nobutake Nodera; Kazuhide Hasebe; Masanobu Matsunaga; Kyuji Inoue; Sato Jun

Archive | 2011

Film forming device and method for using same

Kanomi Yamamoto; Kazuhide Hasebe; Nobutake Nodera

Archive | 2007

Method of cleaning thin-film forming device, thin-film formation method, thin-film forming device, and program

Kazuhide Hasebe; Masanobu Matsunaga; Nobutake Nodera; Jun Sato; 潤 佐藤; 正信 松永; 伸武 野寺; 一秀 長谷部

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Collaboration

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Takao Matsumoto

Fukuoka University

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Kazuhide Hasebe

Tokyo Electron

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Masanobu Matsunaga

Tokyo Electron

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Jun Sato

Tokyo Electron

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Kazuya Yamamoto

Tokyo Electron

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Mami N. Fujii

Nara Institute of Science and Technology

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Pao-Hwa Chou

Tokyo Electron

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Ryosuke Mochii Student

Nara Institute of Science and Technology

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Yasuaki Ishikawa

Nara Institute of Science and Technology

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Yukiharu Uraoka

Nara Institute of Science and Technology

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