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Pao-Hwa Chou

Tokyo Electron

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Publication

Featured researches published by Pao-Hwa Chou.

Archive | 2007

Film formation method and apparatus for semiconductor process

Pao-Hwa Chou; Kazuhide Hasebe

Archive | 2005

Film formation apparatus and method for semiconductor process

Kazuhide Hasebe; Pao-Hwa Chou

Archive | 2008

Formation method of fine pattern

Pao-Hwa Chou; Kazuhide Hasebe; Mitsuaki Iwashita; Shigeru Nakajima; Reiji Shinno; 滋 中島; 保華 周; 光秋 岩下; 礼二 新納; 一秀 長谷部

Archive | 2005

Film forming method, film-forming device, and storage medium

Pao-Hwa Chou; Kazuhide Hasebe; 保華 周; 一秀 長谷部

Archive | 2012

SiCN film formation method and apparatus

Pao-Hwa Chou; Kazuhide Hasebe

Archive | 2006

Method and apparatus for forming silicon-containing insulating film

Kazuhide Hasebe; Mitsuhiro Okada; Pao-Hwa Chou; Jun Ogawa; Chaeho Kim; Kohei Fukushima; Toshiki Takahashi; Jun Sato

Archive | 2011

FILM-FORMING METHOD AND FILM-FORMING APPARATUS FOR FORMING SILICON OXIDE FILM ON TUNGSTEN FILM OR TUNGSTEN OXIDE FILM

Jun Sato; Pao-Hwa Chou

Archive | 2005

Film formation method and apparatus for semiconductor process for forming a silicon nitride film

Kazuhide Hasebe; Mitsuhiro Okada; Pao-Hwa Chou; Chaeho Kim; Jun Ogawa

Archive | 2009

Film formation method and apparatus for forming silicon-containing insulating film doped with metal

Kentaro Kadonaga; Yamato Tonegawa; Pao-Hwa Chou; Kazuhide Hasebe; Tetsuya Shibata

Archive | 2006

Deposition method, deposition device, and storage medium

Pao-Hwa Chou; Kazuhide Hasebe; Saiko Kin; Mitsuhiro Okada; Heikun Ri; 保華 周; 充弘 岡田; 丙勲 李; 採虎 金; 一秀 長谷部

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Kazuhide Hasebe

Tokyo Electron

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Mitsuhiro Okada

Tokyo Electron

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Jun Sato

Tokyo Electron

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Mitsuaki Iwashita

Tokyo Electron

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Shigeru Nakajima

Tokyo Electron

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Kentaro Kadonaga

Tokyo Electron

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Masanobu Matsunaga

Tokyo Electron

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Reiji Niino

Tokyo Electron

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Chaeho Kim

Tokyo Electron

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Jun Ogawa

Tokyo Electron

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