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Archive | 1991

HIGH PURITY METALLIC MATERIAL, MANUFACTURE THEREOF, SPUTTERING TARGET USING SAME, AND WIRING NETWORK AND SEMICONDUCTIVE PACKAGE FORMED BY USING SAME

Ishigami Takashi; Kawai Mitsuo; Obata Minoru; Sato Michio; Yamanobe Takashi; Maki Toshihiro; Ando Shigeru; Yagi Noriaki


Archive | 2005

PROCESS FOR FABRICATING SEMICONDUCTOR ELEMENT, AND W MATERIAL FOR MAGNETRON SPUTTERING SYSTEM

Ishigami Takashi; Sato Michio; Obata Minoru; Miyauchi Masami; Kawai Mitsuo; Yamanobe Takashi; Maki Toshihiro; Yagi Noriaki; Ando Shigeru; Kobanawa Yoshiko


Archive | 1996

HIGH-PURITY METALLIC MATERIAL

Ishigami Takashi; Kawai Mitsuo; Obata Minoru; Sato Michio; Yamanobe Takashi; Maki Toshihiro; Ando Shigeru; Yagi Noriaki


Archive | 1999

INTERCONNECTION FILM FOR FORMING SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR PACKAGE

Ishigami Takashi; Kawai Mitsuo; Obata Minoru; Sato Michio; Yamanobe Takashi; Maki Toshihiro; Ando Shigeru; Yagi Noriaki


Archive | 1999

HIGH-PURITY CONDUCTIVE FILM FOR SEMICONDUCTOR DEVICE AND FORMATION THEREOF, AND SEMICONDUCTOR DEVICE USING THE SAME

Ishigami Takashi; Sato Michio; Obata Minoru; Miyauchi Masami; Kawai Mitsuo; Yamanobe Takashi; Maki Toshihiro; Yagi Noriaki; Ando Shigeru; Kobanawa Yoshiko


Archive | 1998

WIRING COATING FOR FORMING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR PACKAGE

Ishigami Takashi; Kawai Mitsuo; Obata Minoru; Sato Michio; Yamanobe Takashi; Maki Toshihiro; Ando Shigeru; Yagi Noriaki


Archive | 1993

SEMICONDUCTOR ELEMENT HIGH PURITY CONDUCTIVE FILM AND SEMICONDUCTOR ELEMENT USING THEREOF

Ishigami Takashi; Sato Michio; Obata Minoru; Miyauchi Masami; Kawai Mitsuo; Yamanobe Takashi; Maki Toshihiro; Yagi Noriaki; Ando Shigeru; Kobanawa Yoshiko


Archive | 2005

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND Ti-W MATERIAL FOR MAGNETRON SPUTTERING SYSTEM

Ishigami Takashi; Sato Michio; Obata Minoru; Miyauchi Masami; Kawai Mitsuo; Yamanobe Takashi; Maki Toshihiro; Yagi Noriaki; Ando Shigeru; Kobanawa Yoshiko


Archive | 1991

Highly purified metal and sputtering target using the same

Ishigami Takashi; Obata Minoru; Kawai Mituo; Satou Michio; Yamanobe Takashi; Maki Toshihiro; Yagi Noriaki; Ando Shigeru


Archive | 1990

APPARATUS FOR PRODUCING HIGH PURITY MULTI-ELEMENTS ALLOY

Obata Minoru; Kobanawa Yoshiko

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