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Osamu Nasu

Hitachi

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Publication

Featured researches published by Osamu Nasu.

Archive | 1996

Apparatus for suppressing electrification of sample in charged beam irradiation apparatus

Katsuhiko Sakai; Osamu Nasu; Yoichi Ose

Archive | 2010

Charged-particle beam system

Osamu Komuro; Osamu Nasu

Archive | 1995

Apparatus and method for ion beam neutralization

Katsuhiko Sakai; Osamu Nasu; Yoichi Ose

Archive | 1993

Apparatus and method for suppressing electrification of sample in charged beam irradiation apparatus

Katsuhiko Sakai; Osamu Nasu; Yoichi Ose

Archive | 2002

Method for measuring dimensions of sample and scanning electron microscope

Osamu Nasu; Tadashi Otaka; Hiroki Kawada; Ritsuo Fukaya; Makoto Ezumi

Archive | 2013

Method for detecting information of an electric potential on a sample and charged particle beam apparatus

Minoru Yamazaki; Akira Ikegami; Hideyuki Kazumi; Osamu Nasu

Archive | 2009

Image processing apparatus for analysis of pattern matching failure

Mitsuji Ikeda; Tatsuya Maeda; Osamu Nasu; Fumihiro Sasajima

Archive | 2008

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREFOR

Muneyuki Fukuda; Hiromasa Yamanashi; Sayaka Tanimoto; Yasunari Souda; Osamu Nasu

Archive | 2010

SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE

Tatsuaki Ishijima; Osamu Nasu; Muneyuki Fukuda; Takeyoshi Ohashi; Hiromasa Yamanashi; Takuji Miyamoto; Kei Sakai

Archive | 2010

METHOD FOR ADJUSTING OPTICAL AXIS OF CHARGED PARTICLE RADIATION AND CHARGED PARTICLE RADIATION DEVICE

Akemi Kono; Osamu Nasu

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Collaboration

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Hiroki Kawada

Hitachi

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Hiromasa Yamanashi

Hitachi

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Katsuhiko Sakai

Hitachi

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Muneyuki Fukuda

Hitachi

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Tatsuya Maeda

Hitachi

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Yoichi Ose

Hitachi

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Atsuko Yamaguchi

Hitachi

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Kei Sakai

Hitachi

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Takeyoshi Ohashi

Hitachi

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Takuji Miyamoto

Hitachi

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