Oscar Hemberg
University of California, San Diego
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Publication
Featured researches published by Oscar Hemberg.
Optics Letters | 2006
G. Vaschenko; A. Garcia Etxarri; Carmen S. Menoni; J. J. Rocca; Oscar Hemberg; Scott H. Bloom; Weilun Chao; Erik H. Anderson; David T. Attwood; Y. Lu; B. A. Parkinson
Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
MRS Proceedings | 2006
Mario C. Marconi; P. Wachulak; M. G. Capeluto; Georgyi Vaschenko; Herman Bravo; Carmen S. Menoni; J. J. Rocca; Erik H. Anderson; Weilun Chao; David T. Attwood; Oscar Hemberg; Bradley Frazer; Scott H. Bloom
Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme ultraviolet lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
conference on lasers and electro optics | 2007
Carmen S. Menoni; Fernando Brizuela; C. Brewer; Herman Bravo; Benjamin Langdon; M. Berrill; Dale Martz; G. Vaschenko; Mario C. Marconi; J. J. Rocca; Weilun Chao; Erik H. Anderson; David T. Attwood; Alexander V. Vinogradov; Igor A. Artioukov; Y. P. Pershyn; V. V. Kondratenko; Oscar Hemberg; Bradley Frazer; Scott H. Bloom
The short wavelength and high brightness of compact extreme ultraviolet lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
Proceedings of SPIE | 2007
Fernando Brizuela; Herman Bravo; G. Vaschenko; M. Berrill; Benjamin Langdon; Carmen S. Menoni; Oscar Hemberg; Scott H. Bloom; Weilun Chao; Erik H. Anderson; David T. Attwood; J. J. Rocca
We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.
Archive | 2007
G. Vaschenko; Fernando Brizuela; Herman Bravo; Carmen S. Menoni; J. J. Rocca; Oscar Hemberg; Bradley Frazer; Scott H. Bloom; W. Chao; Erik H. Anderson; David T. Attwood
We demonstrate single shot ablation of sub-100 nm holes using the focused output from a λ = 46.9 nm capillary discharge laser. Very clean ablation craters with diameters down to 82 nm were produced in polymethyl-methacrylate (PMMA) coated substrates placed at the first and third order focus of a free standing zone plate. These results demonstrate the feasibility of using focused soft xray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
lasers and electro-optics society meeting | 2006
Carmen S. Menoni; G. Vaschenko; Herman Bravo; Fernando Brizuela; J. J. Rocca; Weilun Chao; Erik H. Anderson; David T. Attwood; Oscar Hemberg; Bradley Frazer; Scott H. Bloom
In this work we demonstrate the feasibility of directly ablating sub-100 nm holes using the focused extreme ultraviolet (EUV) wavelength output from a compact lambda=46.9 nm capillary discharge laser. These results demonstrate the feasibility of sub-100 nm patterning of materials with a focused extreme ultraviolet laser beam, opening a path for the development of new nanoprobes and nano-machining tools
Archive | 2011
Carmen S. Menoni; J. J. Rocca; G. Vaschenko; Scott H. Bloom; Erik H. Anderson; Weilun Chao; Oscar Hemberg
Archive | 2006
John A. Adams; Scott H. Bloom; Victor J. Chan; Kristina M. Crousore; Joseph S. Gottlieb; Oscar Hemberg; John J. Lyon; Brett A. Spivey
Archive | 2006
John A. Adams; Kristina M. Crousore; Cherish K Teters; Oscar Hemberg
Archive | 2005
Scott H. Bloom; Oscar Hemberg
