Patrick Beaupré

Deposition and characterization of gold black coatings for thermal infrared detectors

High absorptivity and low thermal mass are two important requirements for coatings applied to thermal infrared detectors. Gold black coatings are very good candidates to ensure these characteristics in the broadband infrared spectral range. A specific deposition system was designed and built at INO in order to provide gold-black coatings for different broadband detection applications including the broadband radiometer (BBR) instrument for the European Space Agency (ESA) EarthCARE satellite. A parametric study targeting uniform optical absorptance within the spectral range from 0.2 μm to 50 μm was conducted. Specular reflectance lower than 10% was obtained for extended wavelength range up to 100 μm. The coating thickness ranges typically between 20 μm and 35 μm, with uniformity of about ± 3 μm over a sample surface of 10x10 mm2. The deposit density was typically ~0.3% of the bulk density of gold. To singulate the blackened infrared detector pixels, a laser micromachining process was developed. The setup exhibits a 1μm positioning accuracy and allows for ablation of 3 μm to 12 μm wide channels through the gold-black thickness, while preserving the pixel and gold-black deposit integrity.

Thermal Dynamics Effects using Pulse-Shaping Laser Sintering of Printed Silver Inks

In recent years, additive manufacturing has been evolving towards flexible substrates for the fabrication of printable electronic devices and circuits. Generally polymer-based, these emerging substrates suffer from their heat sensitivity and low glass-transition temperatures. As such they require new highly-localized sintering processes to treat the electronic inks without damaging the polymer-based substrate. Laser-based sintering techniques have shown great promises to achieve high-quality sintering locally, while controlling the heat penetration to preserve the polymer substrates integrity. In this report, we explore new optimization pathways for dynamic laser-based sintering of conductive silver inks. Multiple passes of a pulsed laser are first performed while varying pulse train frequencies and pulse energies as an attempt to optimize the properties of the silver inks. Then, time-domain pulse shaping is performed to alter the properties of the conductive inks. Together, these pathways allow for the careful control of the time-domain laser energy distribution in order to achieve the best electronic performances while preserving the substrate’s integrity. Sheet resistance values as low as 0.024Ω/□ are achieved, which is comparable to conventional 1-hour oven annealing, with the processing time dramatically reduced to the milisecond range. These results are supported by finite element modeling of the laser-induced thermal dynamics.

Novel vacuum packaged 384×288 broadband bolometer FPA with enhanced absorption in 3-14μm wavelength

This paper reports on the development of a fully packaged focal plane array of broadband microbolometers. The detector makes use of a gold black thin film to expand its absorption range from 3 to 14 μm. A low temperature packaging process was developed to minimize sintering of the gold black absorber during vacuum sealing of the bolometer array package. The gold black absorber was also laser trimmed to prevent lateral diffusion of heat and promote a better MTF. The resulting FPAs show a NETD lower than 25 mK at a frame rate of 50 Hz

Wideband response of a terahertz-millimeter imager based on a 384x288 pixel uncooled bolometric detector

In the past, bolometer-based imagers have been used for earth observation. Uncooled-bolometer based imagers are especially well suited for this due to their low power consumption. NIRST (New Infra-Red Sensor Technology), an example of an imager based on uncooled bolometers, monitors high temperature events on the ground related to fires and volcanic events, and will measure their physical parameters and takes measurements of sea surface temperatures mainly off the coast of South America as well as other targeted opportunities. NIRST has one band in the mid-wave infrared centered at 3.8 um with a bandwidth of 0.8 um, and two bands in the thermal infrared, centered respectively at 10.85 and 11.85 um with a bandwidth of 0.9 um.