Paul Kevin Shufflebotham

Method of high density plasma CVD gap-filling

Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber

Low voltage electrostatic clamp for substrates such as dielectric substrates

Method of polycrystalline silicon hydrogenation

Electrostatic clamp with lip seal for clamping substrates

Shape memory alloy lift pins for semiconductor processing equipment

Method and apparatus for abatement of reaction products from a vacuum processing chamber

Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors

Method of depositing a silicon containing layer on a semiconductor substrate

Depot chimique en phase vapeur active par plasma inductif