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Paul Kevin Shufflebotham

Lam Research

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Publication

Featured researches published by Paul Kevin Shufflebotham.

Archive | 1998

Method of high density plasma CVD gap-filling

Paul Kevin Shufflebotham; Mark Weise

Archive | 1995

Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber

Paul Kevin Shufflebotham; Larry D. Hartsough; Dean R. Denison

Archive | 1995

Low voltage electrostatic clamp for substrates such as dielectric substrates

Paul Kevin Shufflebotham; Michael Barnes

Archive | 1996

Method of polycrystalline silicon hydrogenation

Paul Kevin Shufflebotham

Archive | 1995

Electrostatic clamp with lip seal for clamping substrates

Robert A. Maraschin; Paul Kevin Shufflebotham; Michael Barnes

Archive | 1995

Shape memory alloy lift pins for semiconductor processing equipment

Paul Kevin Shufflebotham; Christopher Griffin

Archive | 2004

Method and apparatus for abatement of reaction products from a vacuum processing chamber

Paul Kevin Shufflebotham; Michael Barnes

Archive | 1996

Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors

Paul Kevin Shufflebotham; Michael Barnes

Archive | 1999

Method of depositing a silicon containing layer on a semiconductor substrate

Alex Demos; Paul Kevin Shufflebotham; Michael Barnes; Huong Nguyen; Brian Mcmillin; Monique Ben-Dor

Archive | 1997

Depot chimique en phase vapeur active par plasma inductif

Paul Kevin Shufflebotham; Brian Mcmillin; Alex Demos; Huong Nguyen; Butch Berney; Monique Ben-Dor

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Michael Barnes

Lam Research

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Alex Demos

Lam Research

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Brian Mcmillin

Lam Research

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Huong Nguyen

Lam Research

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Monique Ben-Dor

Lam Research

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Butch Berney

Lam Research

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Christopher Griffin

Lam Research

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Dean R. Denison

Lam Research

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Larry D. Hartsough

Lam Research

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Mark Weise

Lam Research

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