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Butch Berney

Lam Research

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Publication

Featured researches published by Butch Berney.

Archive | 2001

Inductively coupled plasma downstream strip module

Wenli Collison; Michael Barnes; Tuqiang O. Ni; Butch Berney; Wayne W. Vereb; Brian Mcmillin

Archive | 1996

Variable high temperature chuck for high density plasma chemical vapor deposition

Brian Mcmillin; Michael Barnes; Butch Berney; Huong Nguyen

Archive | 1999

Method for high density plasma chemical vapor deposition of dielectric films

Brian Mcmillin; Huong Nguyen; Michael Barnes; Butch Berney

Archive | 2003

Apparatus and methods for minimizing arcing in a plasma processing chamber

Arthur M. Howald; Andras Kuthi; Andrew D. Bailey; Butch Berney

Archive | 1997

Apparatus and method for high density plasma chemical vapor deposition

Brian Mcmillin; Huong Nguyen; Michael Barnes; Butch Berney

Archive | 2006

Minimizing arcing in a plasma processing chamber

Arthur M. Howald; Andras Kuthi; Andrew D. Bailey; Butch Berney

Archive | 2003

Vorrichtung zur verminderung von überschlägen in einer plasma-bearbeitungskammer

Arthur M. Howald; Andras Kuthi; Andrew D. Bailey; Butch Berney

Archive | 1997

Apparatus and method for high density plasma chemical vapor deposition or etching

Michael Barnes; Butch Berney; Brian Mcmillin; Huong Nguyen

Archive | 1997

Verfahren zum Auffüllen von Zwischenräumen mit INDUKTIV GEKOPPELTEm PLASMA-CVD A method for filling of the gaps with inductively coupled plasma-CVD

Kevin Shufflebotham; Brian Mcmillin; T Demos; Huong Nguyen; Butch Berney; Monique Ben-Dor

Archive | 1997

Depot chimique en phase vapeur active par plasma inductif

Paul Kevin Shufflebotham; Brian Mcmillin; Alex Demos; Huong Nguyen; Butch Berney; Monique Ben-Dor

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Collaboration

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Brian Mcmillin

Lam Research

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Huong Nguyen

Lam Research

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Michael Barnes

Lam Research

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Andras Kuthi

Lam Research

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Andrew D. Bailey

Lam Research

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Arthur M. Howald

Lam Research

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Monique Ben-Dor

Lam Research

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Alex Demos

Lam Research

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Paul Kevin Shufflebotham

Lam Research

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Tuqiang O. Ni

Lam Research

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