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Dean R. Denison

Lam Research

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Publication

Featured researches published by Dean R. Denison.

Archive | 1993

Process for depositing a SiOx film having reduced intrinsic stress and/or reduced hydrogen content

Mark Weise; Dean R. Denison

Archive | 1990

Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors

James E. Tappan; Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt

Archive | 1995

Apparatus and method for magnetron in-situ cleaning of plasma reaction chamber

Paul Kevin Shufflebotham; Larry D. Hartsough; Dean R. Denison

Archive | 1997

Method for preparing nitrogen surface treated fluorine doped silicon dioxide films

Dean R. Denison; Ajay Saproo; David T. Hodul

Archive | 1996

Method for depositing fluorine doped silicon dioxide films

Dean R. Denison; James Lam

Archive | 1997

Method of in-situ cleaning of a chuck within a plasma chamber

Dean R. Denison; William Harshbarger; Anwar Husain; C. Robert Koemtzopoulos; Felix Kozakevich; David Trussell

Archive | 1994

Reaction chamber design to minimize particle generation in chemical vapor deposition reactors

Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt; James E. Tappan

Archive | 1995

Chuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing system

Dean R. Denison; David R. Pirkle; Alain Harrus

Archive | 1991

Minimization of particle generation in cvd reactors and methods

James E. Tappan; Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt

Archive | 1999

Method and apparatus for improving refractive index of dielectric films

Dean R. Denison

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Arthur K. Yasuda

Lam Research

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James E. Tappan

Lam Research

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Mark Weise

Lam Research

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Randall S. Mundt

Lam Research

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James Lam

Lam Research

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Ajay Saproo

Lam Research

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Anwar Husain

Lam Research

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C. Robert Koemtzopoulos

Lam Research

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David T. Hodul

Lam Research

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David Trussell

Lam Research

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