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Dive into the research topics where Qingjun Zhou is active.

Publication


Featured researches published by Qingjun Zhou.


Archive | 2014

METHOD OF PATTERNING A SILICON NITRIDE DIELECTRIC FILM

Srinivas D. Nemani; Qingjun Zhou; Dmitry Lubomirsky; Sergey G. Belostotskiy


Archive | 2014

METHOD OF PATTERNING A LOW-K DIELECTRIC FILM

Srinivas D. Nemani; Qingjun Zhou; Dmitry Lubomirsky; Sergey G. Belostotskiy


Archive | 2010

PLASMA-BASED ORGANIC MASK REMOVAL WITH SILICON FLUORIDE

Yifeng Zhou; Qingjun Zhou; Ling Wang; Nancy Fung


Archive | 2011

Methods for etching silicon-based antireflective layers

Yifeng Zhou; Qingjun Zhou; Ryan Patz; Michael D. Armacost


Archive | 2008

method of photoresist removal in the presence of a low-k dielectric layer

SiYi Li; Ryan Patz; Qingjun Zhou; Michael D. Armacost


Archive | 2016

CYCLIC SPACER ETCHING PROCESS WITH IMPROVED PROFILE CONTROL

Qingjun Zhou; Jungmin Ko; Tom Choi; Sean Kang; Srinivas D. Nemani; Ying Zhang


Archive | 2015

Temperature ramping using gas distribution plate heat

Sergey G. Belostotskiy; Chinh Dinh; Qingjun Zhou; Srinivas D. Nemani; Andrew Nguyen


Archive | 2013

Silicon oxide recess etch

Nancy Fung; David T. Or; Qingjun Zhou; Lina Zhu; Srinivas D. Nemani; Sean S. Kang; Sergey G. Belostotskiy; Chinh Dinh


Archive | 2008

METHOD FOR PLASMA ETCHING POROUS LOW-K DIELECTRIC LAYERS

SiYi Li; Qingjun Zhou; Ryan Patz; Yifeng Zhou; Michael D. Armacost


Bulletin of the American Physical Society | 2008

Porous Low-k Material Etch For 32 nm and Beyond

Yifeng Zhou; Qingjun Zhou; Ryan Patz; Hairong Tang; Michael D. Armacost; Catherine Labelle; David V. Horak

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