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Qunhua Wang

Applied Materials

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Publication

Featured researches published by Qunhua Wang.

Archive | 2004

Plasma uniformity control by gas diffuser hole design

Soo Young Choi; John M. White; Qunhua Wang; Li Hou; Ki Woon Kim; Shinichi Kurita; Tae Kyung Won; Suhail Anwar; Beom Soo Park; Robin L. Tiner

Archive | 2004

Method of controlling the film properties of PECVD-deposited thin films

Soo Young Choi; John M. White; Qunhua Wang; Beom Soo Park

Archive | 2004

Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors

Soo Young Choi; Tae Kyung Won; Gaku Furuta; Qunhua Wang; John M. White; Beom Soo Park

Archive | 2004

Methods and apparatus for reducing arcing during plasma processing

Li Hou; Qunhua Wang; Edwin Sum; John M. White

Archive | 2007

Contamination reducing liner for inductively coupled chamber

Soo Young Choi; Qunhua Wang

Archive | 2011

Showerhead support structure for improved gas flow

Robin L. Tiner; Soo Young Choi; Qunhua Wang; Jrjyan Jerry Chen

Archive | 2008

Gas distribution uniformity improvement by baffle plate with multi-size holes for large size PECVD systems

Qunhua Wang; Li Hou; Sanjay Yadav; Gaku Furuta; Kenji Omori; Soo Young Choi; John M. White

Archive | 2005

Shadow frame with cross beam for semiconductor equipment

Sakae Tanaka; Qunhua Wang; Sanjay Yadav; Quanyuan Shang; William R. Harshbarger

Archive | 2008

Apparatus and method for deposition over large area substrates

John M. White; Sanjay Yadav; Qunhua Wang; Soo Young Choi; Weijie Wang

Archive | 2005

Sulfur hexafluoride remote plasma source clean

Soo Young Choi; Qunhua Wang

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Collaboration

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Soo Young Choi

Applied Materials

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Beom Soo Park

Applied Materials

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Robin L. Tiner

Applied Materials

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John M. White

Applied Materials

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Gaku Furuta

Applied Materials

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Lai Zhao

Applied Materials

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Li Hou

Applied Materials

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Tae Kyung Won

Applied Materials

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Sanjay Yadav

Applied Materials

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Weijie Wang

Applied Materials

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