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Gaku Furuta

Applied Materials

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Publication

Featured researches published by Gaku Furuta.

Archive | 2004

Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors

Soo Young Choi; Tae Kyung Won; Gaku Furuta; Qunhua Wang; John M. White; Beom Soo Park

Archive | 2007

Asymmetric grounding of rectangular susceptor

Gaku Furuta; Soo Young Choi; Young Jin Choi

Archive | 2010

Ground return for plasma processes

Soo Young Choi; Robin L. Tiner; Shinichi Kurita; John M. White; Carl A. Sorensen; Jeffrey A. Kho; Suhail Anwar; Makoto Inagawa; Gaku Furuta

Archive | 2008

DIFFERENTIAL ETCH RATE CONTROL OF LAYERS DEPOSITED BY CHEMICAL VAPOR DEPOSITION

Soo Young Choi; Gaku Furuta

Archive | 2008

Gas distribution uniformity improvement by baffle plate with multi-size holes for large size PECVD systems

Qunhua Wang; Li Hou; Sanjay Yadav; Gaku Furuta; Kenji Omori; Soo Young Choi; John M. White

Archive | 2008

Method and apparatus for controlling plasma uniformity

Jozef Kudela; Gaku Furuta; Carl A. Sorensen; Soo Young Choi; John M. White

Archive | 2010

Thin film transistors having multiple doped silicon layers

Gaku Furuta; Soo Young Choi; Omori Kenji

Archive | 2008

OFFSET LINER FOR CHAMBER EVACUATION

Robin L. Tiner; Suhail Anwar; Gaku Furuta; Young Jin Choi; Beom Soo Park; Soo Young Choi; John M. White

Archive | 2011

A-Si seasoning effect to improve SiN run-to-run uniformity

Gaku Furuta; Soo Young Choi; Beom Soo Park; Young Jin Choi; Omori Kenji

Archive | 2004

Deposition repeatability of PECVD films

Gaku Furuta; Tae Kyung Won; John M. White

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Collaboration

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Soo Young Choi

Applied Materials

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John M. White

Applied Materials

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Robin L. Tiner

Applied Materials

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Suhail Anwar

Applied Materials

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Beom Soo Park

Applied Materials

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Shinichi Kurita

Applied Materials

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Young Jin Choi

Applied Materials

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Qunhua Wang

Applied Materials

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Tae Kyung Won

Applied Materials

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Lai Zhao

Applied Materials

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