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Dive into the research topics where Dirk Drescher is active.

Publication


Featured researches published by Dirk Drescher.


Archive | 2001

Method of structuring layers with a polysilicon layer and an overlying metal or metal silicide layer using a three step etching process with fluorine, chlorine, bromine containing gases

Joerg Dreybrodt; Dirk Drescher; Ralf Zedlitz; Stephan Wege


Archive | 2001

Semiconductor component and process for its fabrication

Dirk Drescher; Helmut Tews; Martin Schrems; Helmut Wurzer


Archive | 2000

Trench capacitor and method for fabricating the same

Schrems Martin; Dirk Drescher; Helmut Wurzer; Wolfram Karcher


Archive | 2001

Method of producing doped polysilicon layers and polysilicon layered structrues and method of structuring layers and layered structures which comprise polysilicon layers

Joerg Dreybrodt; Dirk Drescher; Ralf Zedlitz; Stephan Wege


Archive | 1999

Trench capacitor used in the production of integrated circuits or chips comprises a trench formed in a substrate, an insulating collar, a trenched sink, a dielectric layer and a conducting trench filling

Martin Schrems; Dirk Drescher; Helmut Wurzer; Wolfram Karcher


Archive | 2002

CVD method of producing in situ-doped polysilicon layers and polysilicon layered structures

Joerg Dreybrodt; Dirk Drescher; Ralf Zedlitz; Stephan Wege


Archive | 2000

Semiconductor element and method for its production

Dirk Drescher; Martin Schrems; Helmut Tews; Helmut Wurzer


Archive | 2002

Method of producing doped polysilicon layers and polysilicon layered structures

Joerg Dreybrodt; Dirk Drescher; Ralf Zedlitz; Stephan Wege


Archive | 2000

Semiconductor element with a tungsten oxide layer and method for its production

Martin Schrems; Dirk Drescher; Helmut Wurzer; Helmut Tews


Archive | 2008

Process of making a doped polysilicon layer

Jörg Dreybrodt; Dirk Drescher; Ralf Zedlitz; Stephan Wege

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