Is this you? Create Your Porfile
Avatar

Randall S. Mundt

Lam Research

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Randall S. Mundt is active.

Explore More

Publication

Featured researches published by Randall S. Mundt.

Archive | 1989

Method and system for clamping semiconductor wafers

David Erskine; Randall S. Mundt; Dariush Rafinejad; Vernon Wong; Gerald Z. Yin

Archive | 1990

Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors

James E. Tappan; Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt

Archive | 1995

Hybrid electrostatic chuck

Randall S. Mundt

Archive | 1996

Method for monitoring process endpoints in a plasma chamber and a process monitoring arrangement in a plasma chamber

David Pirkle; Randall S. Mundt; William Harshbarger

Archive | 2000

Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source

Andrew Perry; Randall S. Mundt

Archive | 1994

Topology induced plasma enhancement for etched uniformity improvement

Randall S. Mundt; David R. Kerr; Eric Lenz

Archive | 1997

Method and apparatus for determining the center and orientation of a wafer-like object

Randall S. Mundt

Archive | 1998

Temperature mapping method

Randall S. Mundt

Archive | 1996

Particulate free vacuum compatible pinch seal

Randall S. Mundt; Kenneth R. Krieg

Archive | 1994

Reaction chamber design to minimize particle generation in chemical vapor deposition reactors

Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt; James E. Tappan

Explore More

Collaboration

Dive into the Randall S. Mundt's collaboration.

Top Co-Authors
Avatar

Arthur K. Yasuda

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Dean R. Denison

Lam Research

View shared research outputs
Top Co-Authors
Avatar

James E. Tappan

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Albert J. Lamm

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Mike Whelan

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Andrew Perry

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Andrew Weeks Kueny

Lam Research

View shared research outputs
Top Co-Authors
Avatar

David R. Kerr

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Eric Lenz

Lam Research

View shared research outputs
Top Co-Authors
Avatar

Dariush Rafinejad

Lam Research

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge