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James E. Tappan

Lam Research

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Publication

Featured researches published by James E. Tappan.

Archive | 1990

Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors

James E. Tappan; Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt

Archive | 2004

Apparatus for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

Archive | 2009

Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle seal

James E. Tappan; Scott Stevenot

Archive | 1994

Reaction chamber design to minimize particle generation in chemical vapor deposition reactors

Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt; James E. Tappan

Archive | 2012

Electrode orientation and parallelism adjustment mechanism for plasma processing systems

James E. Tappan

Archive | 1991

Minimization of particle generation in cvd reactors and methods

James E. Tappan; Arthur K. Yasuda; Dean R. Denison; Randall S. Mundt

Archive | 2009

PLASMA PROCESSING SYSTEMS WITH MECHANISMS FOR CONTROLLING TEMPERATURES OF COMPONENTS

James E. Tappan

Archive | 2009

FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN LINEAR MOTION LEADSCREW AND NUT ASSEMBLY

James E. Tappan

Archive | 2016

CHAMBER WITH VERTICAL SUPPORT STEM FOR SYMMETRIC CONDUCTANCE AND RF DELIVERY

Daniel Arthur Brown; John Patrick Holland; Michael C. Kellogg; James E. Tappan; Jerrel K. Antolik; Ian J. Kenworthy; Theo Panagopoulos; Zhigang Chen

Archive | 2012

Method for spatial and temporal control of temperature on a substrate

Anthony Ricci; Keith Comendant; James E. Tappan

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Collaboration

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Anthony Ricci

Lam Research

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Arthur K. Yasuda

Lam Research

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Dean R. Denison

Lam Research

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Keith Comendant

Lam Research

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Randall S. Mundt

Lam Research

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Daniel Arthur Brown

Lam Research

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Ian J. Kenworthy

Lam Research

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Jerrel K. Antolik

Lam Research

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John Patrick Holland

Lam Research

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Michael C. Kellogg

Lam Research

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