Is this you? Create Your Porfile
Avatar

Reinhold Mühl

IBM

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Reinhold Mühl is active.

Explore More

Publication

Featured researches published by Reinhold Mühl.

Archive | 1988

Process of making via holes in a double-layer insulation

Eva Horner; Reinhold Mühl; Hans-Joachim Trumpp

Archive | 1989

PROCESS FOR MAKING MASKS WITH STRUCTURES IN THE SUBMICRON RANGE

Otto Koblinger; Klaus Meissner; Reinhold Mühl; Hans-Joachim Trumpp; Werner Zapka

Archive | 1989

Method of producing integrated semiconductor structures comprising field-effect transistors with channel lengths in the submicron range using a three-layer resist system

Otto Koblinger; Reinhold Mühl; Hans-Joachim Trumpp

Archive | 1984

Mask and system for mutually aligning objects in ray exposure systems

Harald Bohlen; Helmut Engelke; Johann Greschner; Reinhold Mühl; Peter Nehmiz; Hans J. Trumpp

Archive | 1983

Reverse process for making chromium masks using silicon dioxide dry etch mask

Gunther Bock; Bernhard Hafner; Reinhold Mühl; Klaus Peter Thiel

Archive | 1988

Method of manufacturing masks with structures in the submicrometer region

Otto Koblinger; Klaus Meissner; Reinhold Mühl; Hans-Joachim Trumpp; Werner Zapka

Archive | 1988

Process for manufacturing semiconductor integrated circuits comprising field effect transistors having submicron channels

Otto Koblinger; Reinhold Mühl; Hans-Joachim Trumpp

Archive | 1982

Process and apparatus for the mutual positioning (registration) of objects in X-ray and ion beam lithography

Harald Bohlen; Helmut Engelke; Johann Greschner; Reinhold Mühl; Peter Nehmiz; Hans-Joachim Trumpp

Archive | 1987

Method of producing contact holes in a double insulation layer

Eva Horner; Reinhold Mühl; Hans-Joachim Trumpp

Archive | 1982

Reversal process for the production of chromium masks

Günter Bock; Bernhard Hafner; Reinhold Mühl; Klaus Peter Thiel

Explore More

Collaboration

Dive into the Reinhold Mühl's collaboration.

Top Co-Authors
Avatar

Hans-Joachim Trumpp

IBM

View shared research outputs
Top Co-Authors
Avatar

Otto Koblinger

IBM

View shared research outputs
Top Co-Authors
Avatar

Bernhard Hafner

IBM

View shared research outputs
Top Co-Authors
Avatar

Klaus Peter Thiel

IBM

View shared research outputs
Top Co-Authors
Avatar

Eva Horner

IBM

View shared research outputs
Top Co-Authors
Avatar

Günter Bock

IBM

View shared research outputs
Top Co-Authors
Avatar

Harald Bohlen

IBM

View shared research outputs
Top Co-Authors
Avatar

Helmut Engelke

IBM

View shared research outputs
Top Co-Authors
Avatar

Johann Greschner

IBM

View shared research outputs
Top Co-Authors
Avatar

Klaus Meissner

IBM

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge