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Reinmuth Jochen

Bosch

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Publication

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Archive | 2011

Verfahren zum Ausbilden von Gräben in einem Halbleiterbauelement

Reinmuth Jochen; Will Barbara; Weber Heribert

Archive | 2011

Method for producing electrical interlayer connection in substrate of micro-component or sensor, involves opening mask layer over substrate area provided for electrical interlayer connection, where mask layer is applied on substrate

Reinmuth Jochen; Will Barbara; Weber Heribert

Archive | 2014

Micromechanical pressure sensor apparatus and associated production method

Classen Johannes; Reinmuth Jochen; Kaelberer Arnd

Archive | 2013

Method for producing electrical feedthrough in substrate, and substrate having electrical feedthrough

Reinmuth Jochen; Bergmann Yvonne

Archive | 2012

Micromechanical component e.g. acceleration sensor, manufacturing method, involves forming trench of sacrificial layer under gitter mask structures that remain overstretched after etching of structures, and closing structures

Reinmuth Jochen; Will Barbara; Weber Heribert

Archive | 2011

Bauelement mit einer elektrischen Durchkontaktierung, Verfahren zur Herstellung eines Bauelementes und Bauelementsystem

Reinmuth Jochen; Weber Heribert

Archive | 2010

Method for manufacturing micromechanical structure, involves applying sacrificial layer on substrate, applying sacrificial layer on function layer, and applying another sacrificial layer on function layer

Reinmuth Jochen; Rettig Christian; Butz Juergen

Archive | 2010

Component, has substrate provided with continuous opening that is realized by forming holes by deep reactive ion etching, where one of holes is located close to other hole and has depth lower than that of former hole

Reinmuth Jochen; Weber Heribert

Archive | 2017

Micromechanical component with diffusion stop channel

Breitling Achim; Reichenbach Frank; Reinmuth Jochen; Amthor Julia

Archive | 2017

OMM-Drehraten mit Antrieb ohne feststehende Elektroden

Lassl Andreas; Pruetz Odd-Axel; Reinmuth Jochen

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Weber Heribert

Bosch

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Classen Johannes

Bosch

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Will Barbara

Bosch

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Bergmann Yvonne

Bosch

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Butz Juergen

Bosch

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Frey Jens

Bosch

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Graf Eckhard

Bosch

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Kaelberer Arnd

Bosch

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Lassl Andreas

Bosch

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Lindemann Timo

Bosch

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