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Graf Eckhard

Bosch

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Publication

Featured researches published by Graf Eckhard.

Archive | 2000

Micro-mechanical component production, used as sensor element or actuator element, comprises providing functional element and/or functional layer with protective layer

Fischer Frank; Hein Peter; Graf Eckhard

Archive | 2008

Verfahren zur Herstellung eines mikromechanischen Bauelements mit Auffüllschicht und Maskenschicht

Scheuerer Roland; Weber Heribert; Graf Eckhard

Archive | 2003

Process for connecting a silicon plate to a further plate comprises directing a laser beam onto the further plate through the silicon plate

Reichenbach Frank; Fischer Frank; Hausner Ralf; Haag Frieder; Graf Eckhard; Lutz Markus

Archive | 2003

Mikromechanische Kappenstruktur und entsprechendes Herstellungsverfahren

Fischer Frank; Hein Peter; Graf Eckhard

Archive | 2017

MEMS-Bauteil mit zwei unterschiedlichen Innendrücken

Reinmuth Jochen; Breitling Achim; Frey Jens; Graf Eckhard; Ametowobla Mawuli

Archive | 2016

Process for the production of a micromechanical component with fill-up-layer and mask-layer

Scheuerer Roland; Weber Heribert; Graf Eckhard

Archive | 2016

Process for filling cavities in wafers

Frey Jens; Weber Heribert; Graf Eckhard; Schlosser Roman

Archive | 2014

Verfahren zur Herstellung von Halbleiterbauelementen mit seitlichen Anschlusspads

Gonska Julian; Schary Timo; Benzel Hubert; Graf Eckhard; Busse Stefan

Archive | 2012

Process for filling cavities in wafers, correspondingly filled blind hole, and wafer with correspondingly filled insulating trenches

Frey Jens; Weber Heribert; Graf Eckhard; Schlosser Roman

Archive | 2012

PROCEDIMENTO ATTO AL RIEMPIMENTO DI CAVITA' IN WAFER, FORO CIECO CORRISPONDENTEMENTE RIEMPITO E WAFER CON SCANALATURE DI ISOLAMENTO CORRISPONDENTEMENTE RIEMPITE

Frey Jens; Graf Eckhard; Schlosser Roman; Weber Heribert

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Collaboration

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Fischer Frank

Bosch

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Weber Heribert

Bosch

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Frey Jens

Bosch

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Schlosser Roman

Bosch

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Hein Peter

Bosch

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Lutz Markus

Bosch

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Reinmuth Jochen

Bosch

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Scheuerer Roland

Bosch

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Benzel Hubert

Bosch

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Bischof Udo

Bosch

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