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Rene George

Mattson Technology, Inc.

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Publication

Featured researches published by Rene George.

Archive | 1998

Systems and methods for plasma enhanced processing of semiconductor wafers

Leroy Luo; Rene George; Stephen E. Savas; Craig Ranft; Wolfgang Helle; Robert Guerra; Brady F. Cole

Archive | 1999

Systems and methods for two-sided etch of a semiconductor substrate

Laizhong Luo; Ying Holden; Rene George; Robert Guerra; Allan B. Wiesnoski; Nicole Kuhl; Craig Ranft; Sai Mantripragada

Archive | 1998

Systems and methods for variable mode plasma enhanced processing of semiconductor wafers

Leroy Luo; Rene George; Stephen E. Savas; Craig Ranft; Wolfgang Helle; Robert Guerra

Archive | 2003

Photoresist implant crust removal

Rene George; John Zajac; Daniel J. Devine; Craig Ranft; Andreas Kadavanich

Archive | 2007

Multi-workpiece processing chamber

Daniel J. Devine; Rene George; Ce Qin; Dixit Desai

Archive | 2008

Advanced multi-workpiece processing chamber

Daniel J. Devine; Charles Crapuchettes; Dixit Desai; Rene George; Vincent C. Lee; Yuya Saratoga Matsuda; Jonathan Mohn; Ryan Pakulski; Stephen E. Savas; Martin Zucker

Archive | 2004

System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing

Stephen E. Savas; Songlin Xu; David Dutton; Andreas Kadavanich; Rene George

Archive | 2004

Slotted electrostatic shield modification for improved etch and CVD process uniformity

Rene George; Andreas Kadavanich; Daniel J. Devine; Stephen E. Savas; John Zajac; Hongching Shan

Archive | 2007

Post Ion Implant Photoresist Strip using a Pattern Fill and Method

Rene George; Stephen E. Savas

Archive | 2006

Seal arrangement with corrosion barrier and method

Martin Zucker; Daniel J. Devine; Rene George; Josef T. Hoog; Vincent C. Lee

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Collaboration

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Stephen E. Savas

Mattson Technology

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Daniel J. Devine

Mattson Technology

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Ryan Pakulski

Mattson Technology

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Vincent C. Lee

Mattson Technology

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Charles Crapuchettes

Mattson Technology

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Craig Ranft

Mattson Technology

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Jonathan Mohn

Mattson Technology

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Daniel J. Los Gatos Devine

Mattson Technology

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John Zajac

Mattson Technology

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Yuya Saratoga Matsuda

Mattson Technology

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