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John Zajac

Mattson Technology, Inc.

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Publication

Featured researches published by John Zajac.

Archive | 2007

Systems and Methods for Photoresist Strip and Residue Treatment in Integrated Circuit Manufacturing

Stephen E. Savas; John Zajac; Robert Guerra; Wolfgang Helle

Archive | 2006

Etching Apparatus and Process with Thickness and Uniformity Control

John Zajac; Stephen E. Savas

Archive | 2001

Systems and methods for enhancing plasma processing of a semiconductor substrate

Stephen E. Savas; John Zajac; Mark J. Kushner; Ronald L. Kinder

Archive | 2003

Photoresist implant crust removal

Rene George; John Zajac; Daniel J. Devine; Craig Ranft; Andreas Kadavanich

Archive | 2004

Slotted electrostatic shield modification for improved etch and CVD process uniformity

Rene George; Andreas Kadavanich; Daniel J. Devine; Stephen E. Savas; John Zajac; Hongching Shan

Archive | 2004

Clamp for holding and efficiently removing heat from workpieces

Stephen E. Savas; John Zajac

Archive | 2001

Fast etching system and process

John Zajac; Stephen E. Savas

Archive | 2003

Systems and methods for cleaning semiconductor substrates using a reduced volume of liquid

Stephen E. Savas; John Zajac; Carl Galewski

Archive | 2001

Electrostatic clamp for holding workpieces with irregular surfaces

Stephen E. Savas; John Zajac

Archive | 2003

System and method for removing material

Daniel J. Devine; Rene George; Andreas Kadavanich; Craig Ranft; John Zajac

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Collaboration

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Stephen E. Savas

Mattson Technology

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Rene George

Mattson Technology

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Andreas Kadavanich

Mattson Technology

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Craig Ranft

Mattson Technology

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Daniel J. Devine

Mattson Technology

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Daniel J. Los Gatos Devine

Mattson Technology

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Hongching Shan

Mattson Technology

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Mark J. Kushner

University of Michigan

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Robert Guerra

Mattson Technology

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Wolfgang Helle

Mattson Technology

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