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René Schenck

Leica Microsystems

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Publication

Featured researches published by René Schenck.

Archive | 2005

System zur Detektion von Makrodefekten

Albert Kreh; René Schenck; Henning Backhauss

Archive | 2004

System for the detection of macrodefects

Albert Kreh; Henning Backhauss; René Schenck

Archive | 2005

Apparatus for Inspecting the front side and backside of a disk-shaped object

Thomas Iffland; René Schenck

Archive | 2008

Method of determining geometric parameters of a wafer

René Schenck; Ralf Friedrich; Thomas Iffland; Daniel Skiera

Archive | 2008

Verfahren zur Bestimmung geometrischer Parameter eines Wafers und Verwendung des Verfahren bei der optischen Inspektion von Wafern

René Schenck; Ralf Friedrich; Iffland, Thomas, Dipl.-Phys.; Daniel Skiera

Archive | 2009

Device for holding disk-shaped objects

René Schenck; Thomas Iffland; Winfried Deutscher

Archive | 2008

Apparatus for holding disk-like objects

René Schenck; Detlef Wolter; Thomas Iffland; Winfried Deutscher

Archive | 2006

Vorrichtung zur Inspektion der Vorder- und Rückseite eines scheibenförmigen Objekts

Thomas Iffland; René Schenck

Archive | 2006

Method for determining the lateral offset of an XYZ stage

René Schenck

Archive | 2009

Vorrichtung zum Haltern von scheibenförmigen Objekten

René Schenck; Detlef Wolter; Iffland, Thomas, Dipl.-Phys.; Winfried Deutscher

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Collaboration

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Thomas Iffland

Leica Microsystems

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Albert Kreh

Leica Microsystems

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Henning Backhauss

Leica Microsystems

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Knut Hiltawski

Leica Microsystems

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