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Richard C. Hawthorne

Micron Technology

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Publication

Featured researches published by Richard C. Hawthorne.

Archive | 1996

Method of wafer cleaning, and system and cleaning solution regarding same

Li Li; Donald L. Westmoreland; Richard C. Hawthorne; Kevin J. Torek

Archive | 1998

System for wafer cleaning

Li Li; Donald L. Westmoreland; Richard C. Hawthorne; Kevin J. Torek

Archive | 1997

Method for forming a dielectric

Li Li; Randhir P. S. Thakur; Richard C. Hawthorne

Archive | 1996

Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system

Kevin J. Torek; Whonchee Lee; Richard C. Hawthorne

Archive | 1993

Method for enhancing nitridation and oxidation growth by introducing pulsed NF3

Randhir P. S. Thakur; Richard C. Hawthorne; Annette L. Martin; Gurtej S. Sandhu

Archive | 1997

Selective etching of oxides

Kevin J. Torek; Whonchee Lee; Richard C. Hawthorne

Archive | 1995

Process for dry cleaning wafer surfaces using a surface diffusion layer

Li Li; Richard C. Hawthorne

Archive | 1999

Methods and etchants for etching oxides of silicon with low selectivity

Whonchee Lee; Richard C. Hawthorne; Li Li; Pai Hung Pan

Archive | 1996

Photoresist removal process using heated solvent vapor

Richard C. Hawthorne; Jonathan C. Morgan; Li Li

Archive | 1998

Method for in situ removal of particulate residues resulting from cleaning treatments

Richard C. Hawthorne; Whonchee Lee

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Li Li

Micron Technology

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Whonchee Lee

Micron Technology

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Kevin J. Torek

Micron Technology

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Donald L. Westmoreland

Micron Technology

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Randhir P. S. Thakur

Micron Technology

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Annette L. Martin

Micron Technology

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Elvia M. Hawthorne

Micron Technology

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Gurtej S. Sandhu

Micron Technology

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Jonathan C. Morgan

Micron Technology

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Pai Hung Pan

Micron Technology

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