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Robbert M. Vermeulen

Applied Materials

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Publication

Featured researches published by Robbert M. Vermeulen.

Archive | 2004

Reactor design to reduce particle deposition during process abatement

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Leonard B. Todd; Robbert M. Vermeulen

Archive | 2002

OXYGEN ENHANCED CDA MODIFICATION TO A CDO INTEGRATED SCRUBBER

Belynda Flippo; Keith Karrup; Robbert M. Vermeulen; Daniel O. Clark

Archive | 2004

Safety, monitoring and control features for thermal abatement reactor

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Youssef A. Loldj; Robbert M. Vermeulen

Archive | 2007

Methods and apparatus for pfc abatement using a cdo chamber

Sebastien Raoux; Kuo-Chen Lin; Robbert M. Vermeulen; Daniel O. Clark; Stephen Tsu; Mehran Moalem; Allen Fox; Monique Mcintosh; Joshua Putz; Eric Rieske; Poh Soh Lee

Archive | 2006

Methods and apparatus for process abatement

Sebastien Raoux; Brian Kingston; Mark W. Curry; Daniel O. Clark; Robbert M. Vermeulen; Belynda Flippo; Mark Holst; Steve Tsu; Kevin Lin; Monique Mcintosh

Archive | 2009

Systems and methods for treating flammable effluent gases from manufacturing processes

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Phil Chandler

Archive | 2009

Methods and apparatus for using reduced purity silane to deposit silicon

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Yong Kee Chae; John M. White; Robert Z. Bachrach; Jay J. Jung

Archive | 2008

METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM

Daniel O. Clark; Robbert M. Vermeulen; Youssef A. Loldj; Belynda Flippo; Mehran Moalem; Shaun W. Crawford

Archive | 2008

Methods and systems for designing and validating operation of abatement systems

Phil Chandler; Daniel O. Clark; Robbert M. Vermeulen; Belynda Flippo; Mehran Moalem; Charles Murray

Archive | 2006

Apparatus for manufacturing a process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robbert M. Vermeulen; Shaun W. Crawford

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Collaboration

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Daniel O. Clark

Dow Chemical Company

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Shaun W. Crawford

Applied Materials

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Jay J. Jung

Applied Materials

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Youssef A. Loldj

Applied Materials

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Belynda Flippo

Applied Materials

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Ho-Man Rodney Chiu

Applied Materials

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Daniel O. Clark

Dow Chemical Company

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Mehran Moalem

Applied Materials

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Phil Chandler

Applied Materials

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Sebastien Raoux

Applied Materials

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