Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Robbert M. Vermeulen is active.

Publication


Featured researches published by Robbert M. Vermeulen.


Archive | 2004

Reactor design to reduce particle deposition during process abatement

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Leonard B. Todd; Robbert M. Vermeulen


Archive | 2002

OXYGEN ENHANCED CDA MODIFICATION TO A CDO INTEGRATED SCRUBBER

Belynda Flippo; Keith Karrup; Robbert M. Vermeulen; Daniel O. Clark


Archive | 2004

Safety, monitoring and control features for thermal abatement reactor

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Youssef A. Loldj; Robbert M. Vermeulen


Archive | 2007

Methods and apparatus for pfc abatement using a cdo chamber

Sebastien Raoux; Kuo-Chen Lin; Robbert M. Vermeulen; Daniel O. Clark; Stephen Tsu; Mehran Moalem; Allen Fox; Monique Mcintosh; Joshua Putz; Eric Rieske; Poh Soh Lee


Archive | 2006

Methods and apparatus for process abatement

Sebastien Raoux; Brian Kingston; Mark W. Curry; Daniel O. Clark; Robbert M. Vermeulen; Belynda Flippo; Mark Holst; Steve Tsu; Kevin Lin; Monique Mcintosh


Archive | 2009

Systems and methods for treating flammable effluent gases from manufacturing processes

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Phil Chandler


Archive | 2009

Methods and apparatus for using reduced purity silane to deposit silicon

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Yong Kee Chae; John M. White; Robert Z. Bachrach; Jay J. Jung


Archive | 2008

METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM

Daniel O. Clark; Robbert M. Vermeulen; Youssef A. Loldj; Belynda Flippo; Mehran Moalem; Shaun W. Crawford


Archive | 2008

Methods and systems for designing and validating operation of abatement systems

Phil Chandler; Daniel O. Clark; Robbert M. Vermeulen; Belynda Flippo; Mehran Moalem; Charles Murray


Archive | 2006

Apparatus for manufacturing a process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robbert M. Vermeulen; Shaun W. Crawford

Collaboration


Dive into the Robbert M. Vermeulen's collaboration.

Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Top Co-Authors

Avatar
Researchain Logo
Decentralizing Knowledge