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Shaun W. Crawford

Applied Materials

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Publication

Featured researches published by Shaun W. Crawford.

Archive | 2004

Reactor design to reduce particle deposition during process abatement

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Leonard B. Todd; Robbert M. Vermeulen

Archive | 2004

Safety, monitoring and control features for thermal abatement reactor

Ho-Man Rodney Chiu; Daniel O. Clark; Shaun W. Crawford; Jay J. Jung; Youssef A. Loldj; Robbert M. Vermeulen

Archive | 2008

METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM

Daniel O. Clark; Robbert M. Vermeulen; Youssef A. Loldj; Belynda Flippo; Mehran Moalem; Shaun W. Crawford

Archive | 2006

Methods and apparatus for manufacturing a process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robert M. Vermeulen; Shaun W. Crawford

Archive | 2009

Methods and apparatus for operating an electronic device manufacturing system

Daniel O. Clark; Phil Chandler; Shaun W. Crawford; Jay J. Jung; Youssef A. Loldj; Maxime Cayer

Archive | 2006

Methods and apparatus for selectively coupling process tools to abatement reactors

Daniel O. Clark; Sebastien Raoux; Robert M. Vermeulen; Shaun W. Crawford

Archive | 2006

Methods and apparatus for sensing characteristics of the contents of a process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robert M. Vermeulen; Shaun W. Crawford

Archive | 2010

Energy savings and global gas emissions monitoring

Youssef A. Loldj; Maxime Cayer; Jay J. Jung; Shaun W. Crawford; Dana Tribula; Daniel O. Clark

Archive | 2006

Process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robert M. Vermeulen; Shaun W. Crawford

Archive | 2006

Apparatus for manufacturing a process abatement reactor

Daniel O. Clark; Sebastien Raoux; Robbert M. Vermeulen; Shaun W. Crawford

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Collaboration

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Daniel O. Clark

Dow Chemical Company

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Youssef A. Loldj

Applied Materials

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Robbert M. Vermeulen

Applied Materials

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Jay J. Jung

Applied Materials

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Ho-Man Rodney Chiu

Applied Materials

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Sebastien Raoux

Applied Materials

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Robert M. Vermeulen

Applied Materials

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Maxime Cayer

Applied Materials

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Allen Fox

Applied Materials

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Leonard B. Todd

Applied Materials

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