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Dive into the research topics where Mehran Moalem is active.

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Featured researches published by Mehran Moalem.


Environmental Science & Technology | 2010

Life-Cycle Nitrogen Trifluoride Emissions from Photovoltaics

Vasilis Fthenakis; Daniel O. Clark; Mehran Moalem; Phil Chandler; Robert Gordon Ridgeway; Forrest E. Hulbert; David B. Cooper; Peter James Maroulis

Amorphous- and nanocrystalline-silicon thin-film photovoltaic modules are made in high-throughput manufacturing lines that necessitate quickly cleaning the reactor. Using NF₃, a potent greenhouse gas, as the cleaning agent triggered concerns as recent reports reveal that the atmospheric concentrations of this gas have increased significantly. We quantified the life-cycle emissions of NF₃ in photovoltaic (PV) manufacturing, on the basis of actual measurements at the facilities of a major producer of NF₃ and of a manufacturer of PV end-use equipment. From these, we defined the best practices and technologies that are the most likely to keep worldwide atmospheric concentrations of NF₃ at very low radiative forcing levels. For the average U.S. insolation and electricity-grid conditions, the greenhouse gas (GHG) emissions from manufacturing and using NF₃ in current PV a-Si and tandem a-Si/nc-Si facilities add 2 and 7 g CO₂(eq)/kWh, which can be displaced within the first 1-4 months of the PV system life.


Archive | 2000

Porous ceramic liner for a plasma source

Kartik Ramaswamy; Kwok Manus Wong; Ashish Bhatnagar; Mehran Moalem; Tony S. Kaushal; Shamouil Shamouilian


Archive | 2002

Abatement of fluorine gas from effluent

Shamouil Shamouilian; Mehran Moalem; Tony S. Kaushal


Archive | 2007

Methods and apparatus for pfc abatement using a cdo chamber

Sebastien Raoux; Kuo-Chen Lin; Robbert M. Vermeulen; Daniel O. Clark; Stephen Tsu; Mehran Moalem; Allen Fox; Monique Mcintosh; Joshua Putz; Eric Rieske; Poh Soh Lee


Archive | 2008

METHODS AND APPARATUS FOR REDUCING THE CONSUMPTION OF REAGENTS IN ELECTRONIC DEVICE MANUFACTURING PROCESSES

Daniel O. Clark; Robert Z. Bachrach; Mehran Moalem; Jay J. Jung


Archive | 2010

Methods and apparatus for treating exhaust gas in a processing system

Colin John Dickinson; Mehran Moalem; Daniel O. Clark


Archive | 2009

Systems and methods for treating flammable effluent gases from manufacturing processes

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Phil Chandler


Archive | 2006

TREATMENT OF EFFLUENT CONTAINING CHLORINE-CONTAINING GAS

Mehran Moalem; Morteza Frania


Archive | 2009

Methods and apparatus for using reduced purity silane to deposit silicon

Daniel O. Clark; Mehran Moalem; Robbert M. Vermeulen; Yong Kee Chae; John M. White; Robert Z. Bachrach; Jay J. Jung


Archive | 2008

METHODS AND APPARATUS FOR EFFICIENT OPERATION OF AN ABATEMENT SYSTEM

Daniel O. Clark; Robbert M. Vermeulen; Youssef A. Loldj; Belynda Flippo; Mehran Moalem; Shaun W. Crawford

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